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Publication
Featured researches published by Charles H. Wood.
Optical Microlithography I: Technology for the Mid-1980s | 1982
Michael G. Ury; John C. Matthews; Charles H. Wood
An electrodeless microwave powered deep UV source has been developed. This source pro-duces a unique intense spectrum between 190 and 260nm. Deep UV radiated power output efficiencies exceed 10% at microwave power input levels of 1500 watts. The lack of elec-trodes avoids output attenuation due to electrode sputtering that can cause deep UV fall-off and early bulb failure with compact arcs. Optical systems have been designed to utilize this source for effective flood irradiation of wafers with deep UV having good intensity, uniformity and collimation characteristics. One application of this source is to the portable conformable mask (PCM) technique for meeting submicrometer resolution requirements over profiled surfaces. In this application the exposure time to clear a 2 micrometer PMMA layer using the microwave powered deep UV source is less than 30 seconds.
Archive | 1993
James T. Dolan; Michael G. Ury; Charles H. Wood
Archive | 1982
Michael G. Ury; Charles H. Wood
Archive | 1986
Donald Lynch; Mohammad Kamarehi; Michael G. Ury; Charles H. Wood
Archive | 1976
Michael G. Ury; Bernard John Eastlund; Ray S. Braden; Charles H. Wood
Archive | 1988
Donald Lynch; Mohammed Kamarehi; James E. Simpson; Charles H. Wood
Archive | 1993
Michael G. Ury; Charles H. Wood
Archive | 1982
Charles H. Wood; Michael G. Ury
Archive | 1994
James T. Dolan; Michael G. Ury; Charles H. Wood; Brian Turner
Archive | 1982
Michael G. Ury; Charles H. Wood; Patrick J Ryan
