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Publication
Featured researches published by Charles M. McKenna.
Radiation Effects and Defects in Solids | 1979
John Howard Keller; Charles M. McKenna; James Robert Winnard; W. W. Hicks; J. E. Hoffman; J. R. Kranik; W. F. Mueller
Abstract A high current-low energy implant system for the processing of semiconductor devices at medium-high dopant levels is described. Criteria for selection and design of ion beam components such as ion beam optics, vacuum requirements and reliability are discussed. Variations in wafer uniformities for within wafer, wafer-to-wafer and run-to-run are presented.
Archive | 1978
Charles M. McKenna; H. Keith Willcox
Archive | 1977
John Howard Keller; Charles M. McKenna
Archive | 1978
Charles M. McKenna; Wolfgang Mueller
Archive | 1977
John Lawrence Forneris; William W. Hicks; John Howard Keller; Charles M. McKenna; James A. Seirmarco
Archive | 1980
John Howard Keller; Charles M. McKenna
Archive | 1978
John Howard Keller; Charles M. McKenna; James Robert Winnard
Archive | 1981
John Howard Keller; Charles M. McKenna
Archive | 1977
John Howard Keller; Charles M. McKenna; James Robert Winnard
Archive | 1977
Herbert Lorenz Arndt Jr.; Margaret L. Arndt administratrix by; John Howard Keller; Charles M. McKenna; James Robert Winnard
