Chen Shan | Researchain

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Journal of Semiconductors | 2012

Statistical key variable analysis and model-based control for improvement performance in a deep reactive ion etching process

Chen Shan; Pan Tianhong; Li Zhengming; Jang Shi-Shang

This paper proposes to develop a data-driven vias depth estimator of the deep reactive ion etching process based on statistical identification of key variables. Several feature extraction algorithms are presented to reduce the high-dimensional data and effectively undertake the subsequent virtual metrology (VM) model building process. With the available on-line VM model, the model-based controller is hence readily applicable to improve the quality of a vias depth. Real operational data taken from a industrial manufacturing process are used to verify the effectiveness of the proposed method. The results demonstrate that the proposed method can decrease the MSE from 2.2 ? 10?2 to 9 ? 10?4 and has great potential in improving the existing DRIE process.

Journal of Semiconductors | 2010

Development of a virtual metrology for high-mix TFT-LCD manufacturing processes

Chen Shan; Pan Tianhong; Jang Shi-Shang

Archive | 2014

Machine bench performance matching method and system of semiconductor manufacturing equipment

Pan Tianhong; Chen Shan

Archive | 2014

High-throughput cytotoxicity assessment method

Pan Tianhong; Huang Biao; Chen Shan

Archive | 2013

Virtual measurement method and system for mixed manufacturing process

Pan Tianhong; Chen Shan

RSC Advances (Web) | 2017

統計解析を用いたリアルタイム細胞分析装置のためのエッジ効果検出【Powered by NICT】

Chen Yinghao; Chen Shan; Pan Tianhong; Zou Xiaobo

Archive | 2017

Workshop type polishing dust monitoring and removal device and method

Pan Tianhong; Sun Xueyan; Wang Junfeng; Chen Shan

Archive | 2017

Workshop type polishing dust monitoring system and method based on cloud computing and mobile client App (application)

Pan Tianhong; Song Ying; Wang Junfeng; Chen Shan

Archive | 2016

Method and apparatus of non-soluble deposit density (NSDD) calibration on surface of electric transmission line insulator

Chen Shan; Pan Tianhong

Archive | 2016

Automatic cleaning mechanical arm for transmission line insulators

Chen Shan; Pan Tianhong; Shu Jie; Zhu Yan

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