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Ching-Hwa Chen

Lam Research

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Publication

Featured researches published by Ching-Hwa Chen.

Archive | 1994

Plasma cleaning method for removing residues in a plasma treatment chamber

Ching-Hwa Chen; David Arnett; David Liu

Archive | 1993

Method of treating an article with a plasma apparatus in which a uniform electric field is induced by a dielectric window

Ching-Hwa Chen; David Liu; Duc Tran

Archive | 1992

Plasma apparatus including dielectric window for inducing a uniform electric field in a plasma chamber

Ching-Hwa Chen; David Liu; Duc Tran

Archive | 1996

Dynamic feedback electrostatic wafer chuck

Phillip L. Jones; Seyed Jafar Jafarian-Tehrani; Boris V. Atlas; David R-Chen Liu; Ken Edward Tokunaga; Ching-Hwa Chen

Archive | 1995

Gas dispersion window for plasma apparatus and method of use thereof

Ching-Hwa Chen; David Liu; Mark J. Christensen

Archive | 1997

Elektrostatischer scheibenhalter mit dynamischer ruckkoppelung

Boris V. Atlas; Liu David R. Chen; Ching-Hwa Chen; Seyed Jafar Jafarian-Tehrani; Phillip L. Jones; Ken E. Tokunaga

Archive | 1993

Apparatus and method for plasma treatment in which a uniform electric field through a dielectric window is induced.

Ching-Hwa Chen; David Liu; Duc Tran

Archive | 1993

Plasmareinigungsverfahren zum entfernen von rückständen in einer plasmabehandlungskammer Plasma cleaning process for removing residues from a plasma treatment chamber

Ching-Hwa Chen; David Arnett; David Liu

Archive | 1993

Plasmareinigungsverfahren zum entfernen von rückständen in einer plasmabehandlungskammer

Ching-Hwa Chen; David Arnett; David Liu

Archive | 1993

Appareil de traitement au plasma et procede dans lequel un champ electrique uniforme est induit par une fenetre dielectrique.

Ching-Hwa Chen; David Liu; Duc Tran

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Collaboration

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David Liu

Lam Research

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Duc Tran

Lam Research

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David Arnett

Lam Research

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Boris V. Atlas

Lam Research

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Phillip L. Jones

Lam Research

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Seyed Jafar Jafarian-Tehrani

Lam Research

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David R-Chen Liu

Lam Research

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Ken E. Tokunaga

Lam Research

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Ken Edward Tokunaga

Lam Research

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Mark J. Christensen

Lam Research

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