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Publication


Featured researches published by Chul-Hwan Choi.


Archive | 2002

Self-contained semiconductor device manufacturing equipment having compact arrangement of load-lock and processing chambers

Chul-Hwan Choi; Yong-Gab Kim; Chan-Hyung Cho


Archive | 2002

Heater assembly for manufacturing a semiconductor device

Chul-Hwan Choi; Jin-Ho Jeon; Yong-Gab Kim; Sung-Hwan Jang; Dong-Won Lee; Min-Woo Lee; Kyung-tae Kim


Archive | 2002

Residual gas removing device and method thereof

Chul-Hwan Choi; Jin-Ho Jeon; Yong-Gab Kim; Jong-Seung Yi; Min-Woo Lee; Kyung-tae Kim; Chan-Hyung Cho


Archive | 2001

Control of abnormal growth in dichloro silane (DCS) based CVD polycide WSix films

Jeon-Sig Lim; Jin-Ho Jeon; Jong-Seung Yi; Chul-Hwan Choi


Archive | 2012

Method of cleaning a semiconductor device manufacturing apparatus

Jeon-Ho Kim; Chul-Hwan Choi; Seung-Tae Lee; Yong-Gyu Lim; Kyung-tae Kim; Jae-Min Kim


Archive | 2007

Method of installing semiconductor device manufacturing equipment and mock-up for use in the method

Kyung-tae Kim; Jun-woo Choi; Chul-Hwan Choi


Archive | 2006

Vacuum system of semiconductor device manufacturing equipment

Chul-Hwan Choi; Kyung-tae Kim; Jun-woo Choi


Archive | 2002

Heating unit for the production of a semiconductor device and its use

Chul-Hwan Choi; Sung-Hwan Jang; Jin-Ho Jeon; Kyung-Tae Suwon Kim; Yong-Gab Kim; Dong-Won Lee; Min-Woo Lee


Archive | 2002

Heizaggregat für die Herstellung einer Halbleitervorrichtung und dessen Verwendung The heater assembly for the production of a semiconductor device and its use

Chul-Hwan Choi; Sung-Hwan Jang; Jin-Ho Jeon; Kyung-Tae Suwon Kim; Yong-Gab Kim; Dong-Won Lee; Min-Woo Lee


Archive | 2002

Heizaggregat für die Herstellung einer Halbleitervorrichtung

Chul-Hwan Choi; Jin-Ho Jeon; Yong-Gab Kim; Sung-Hwan Jang; Dong-Won Lee; Min-Woo Lee; Kyung-tae Kim

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