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Chun-Lung Chen

United Microelectronics Corporation

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Featured researches published by Chun-Lung Chen.

Archive | 2015

Method of fabricating metal gate structure

Ching-Ling Lin; Chih-Sen Huang; Shih-fang Tzou; Chien-Ting Lin; Yi-Wei Chen; Shi-Xiong Lin; Chun-Lung Chen; Kun-Yuan Liao; Feng-Yi Chang; Hsiao-pang Chou; Chia-Lin Lu

Archive | 2014

Method of forming a semiconductor device having a metal gate

Chia-Lin Lu; Chun-Lung Chen; Kun-Yuan Liao; Feng-Yi Chang; Shi-Xiong Lin

Archive | 2016

METAL GATE STRUCTURE AND METHOD OF MAKING THE SAME

Shi-Xiong Lin; Chun-Lung Chen; Kun-Yuan Liao; Feng-Yi Chang; Yu-Cheng Tung

Archive | 2015

Semiconductor device and manufacturing methods thereof

Chia-Lin Lu; Chun-Lung Chen; En-Chiuan Liou; Chih-Wei Yang; Yu-Cheng Tung; Kun-Yuan Liao; Feng-Yi Chang

Archive | 2017

Device with Reinforced Metal Gate Spacer and Method of Fabricating

Chia-Lin Lu; Yu-Cheng Tung; Chun-Lung Chen; Kun-Yuan Liao; Feng-Yi Chang

Archive | 2017

Semiconductor device having contact plug in two dielectric layers and two etch stop layers

Ching-Wen Hung; Chih-Sen Huang; Yi-Wei Chen; Chien-Ting Lin; Shih-Fang Tzou; Chia-Lin Lu; Chun-Lung Chen; Kun-Yuan Liao; Feng-Yi Chang; Chieh-Te Chen

Archive | 2017

METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE HAVING GATE STRUCTURE WITH DOPED HARD MASK

Chia-Lin Lu; Chun-Lung Chen; Kun-Yuan Liao; Feng-Yi Chang; Chih-Sen Huang; Ching-Wen Hung; Wei-Hao Huang

Archive | 2016

Method for manufacturing contact holes of a semiconductor device

Chieh-Te Chen; Feng-Yi Chang; Kun-Yuan Liao; Chun-Lung Chen; Ching-Pin Hsu; Shang-yuan Tsai

Archive | 2015

METHOD OF FABRICATING A SEMICONDUCTOR STRUCTURE WITH A SELF-ALIGNED CONTACT

Chia-Lin Lu; Chun-Lung Chen; Kun-Yuan Liao; Feng-Yi Chang; En-Chiuan Liou; Chia-Hsun Tseng; Wei-Hao Huang; Yu-Ting Hung

Archive | 2015

Method for fabricating contact plug in an interlayer dielectric layer

Chia-Lin Lu; Chun-Lung Chen; Feng-Yi Chang; Ching-Wen Hung; Jia-Rong Wu; Yi-Hui Lee; Yi-Kuan Wu; Ying-Cheng Liu; Chih-Sen Huang; Yi-Wei Chen

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