Cory Watkins
Rudolph Technologies, Inc.
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Publication
Featured researches published by Cory Watkins.
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II | 2001
David Vaughnn; Cory Watkins; Dick Anderson
The Rapid Confocal Sensor delivers sub-micron depth and five-micron lateral resolutions over a 300-mm format. With some a priori knowledge of a sample, an analysis over the 300-mm field is completed in approximately 7 minutes. An overview of the optical system (sensor) is given. Application of this technology is made to rapid 3D process inspection of semiconductor samples, particularly die contact bumps. Results demonstrating performance from a commercially available system are presented.
Archive | 1999
Jeffrey O'dell; Thomas Verburgt; Mark R. Harless; Cory Watkins
Archive | 2002
Cory Watkins; David Vaughnn; Alan Blair
Archive | 2004
Cory Watkins; Patrick Simpkins
Archive | 2005
Cory Watkins; David Vaughnn; Pat Simpkins
Archive | 2003
Cory Watkins; Mark R. Harless
Archive | 2007
Cory Watkins; Mark R. Harless; David Vaughnn; Pat Simpkins; Shaileshkumar Goyal; Gerald Brown; Brian Delsey
Archive | 2007
Cory Watkins
Archive | 2004
Patrick Simpkins; Cory Watkins
Archive | 2005
Mark R. Harless; Cory Watkins; Pat Simpkins; Kevin Barr
