D.F. Wiggers de Vries

FIB-SEM cathodoluminescence tomography: practical and theoretical considerations

Focused ion beam–scanning electron microscope (FIB‐SEM) tomography is a powerful application in obtaining three‐dimensional (3D) information. The FIB creates a cross section and subsequently removes thin slices. The SEM takes images using secondary or backscattered electrons, or maps every slice using X‐rays and/or electron backscatter diffraction patterns. The objective of this study is to assess the possibilities of combining FIB‐SEM tomography with cathodoluminescence (CL) imaging. The intensity of CL emission is related to variations in defect or impurity concentrations. A potential problem with FIB‐SEM CL tomography is that ion milling may change the defect state of the material and the CL emission. In addition the conventional tilted sample geometry used in FIB‐SEM tomography is not compatible with conventional CL detectors.