D. L. Goroshko

Morphological, structural and luminescence properties of Si/β-FeSi2/Si heterostructures fabricated by Fe ion implantation and Si MBE

The morphology and optical properties of Si samples implanted by low-energy Fe+ ions with different fluences (1 × 1015–1.8 × 1017 cm−2) and further subjected to pulsed ion-beam treatment (PIBT) have been studied by atomic force microscopy and optical reflectance spectroscopy. It was proved that iron disilicide (β-FeSi2) crystallites were formed on the surface of the Si substrate as a result of ion implantation and PIBT. The method of ultrahigh vacuum and low-temperature (T = 850 °C) cleaning of Fe+-implanted Si samples has been applied for the first time. It was found that it is possible to form smooth epitaxial Si films with both a thickness of up to 1.7 µm and a reconstructed surface by molecular beam epitaxy on the surface of Si samples implanted with a fluence of up to 1 × 1016 cm−2. Further increase in the implantation fluence results in the disruption of epitaxial Si growth and to a strong increase in surface relief roughness due to 3D silicon growth mechanism. Preservation of β-FeSi2 precipitates inside the Si matrix after the formation of a cap epitaxial Si layer has been confirmed by optical spectroscopy data. Low temperature photoluminescence measurements in the range 1400–1700 nm showed that light emission of the formed Si/β-FeSi2/Si heterostructures is due to contributions from β-FeSi2 precipitates and dislocations.

Influence of Cr+ ion implantation and pulsed ion-beam annealing on the formation and optical properties of Si/CrSi2/Si(111) heterostructures

The effect of pulsed ion-beam annealing on the surface morphology, structure, and composition of single-crystal Si(111) wafers implanted by chromium ions with a dose varying from 6 × 1015 to 6 × 1016 cm−2 and on subsequent growth of silicon is investigated for the first time. It is found that pulsed ion-beam annealing causes chromium atom redistribution in the surface layer of the silicon and precipitation of the polycrystalline chromium disilicide (CrSi2) phase. It is shown that the ultrahigh-vacuum cleaning of the silicon wafers at 850°C upon implantation and pulsed ion-beam annealing provides an atomically clean surface with a developed relief. The growth of silicon by molecular beam epitaxy generates oriented 3D silicon islands, which coalesce at a layer thickness of 100 nm and an implantation dose of 1016 cm−2. At higher implantation doses, the silicon layer grows polycrystalline. As follows from Raman scattering data and optical reflectance spectroscopy data, semiconducting CrSi2 precipitates arise inside the silicon substrate, which diffuse toward its surface during growth.

Electroluminescent 1.5-μm light-emitting diodes based on p+-Si/NC β-FeSi2/n-Si structures

The electroluminescence efficiency of silicon light-emitting diode structures with several layers of β-FeSi2 nanocrystallites embedded in the p-n junction is investigated. The nanocrystallites were formed by either solid-phase epitaxy or a combination of reactive and solid-phase epitaxy. For the structures in which the nanocrystallites were formed by the combined method, electroluminescence is observed only at low temperatures (below 70K). This is indicative of a high concentration of defects acting as nonradiative-recombination centers. For the structures with nanocrystallites formed by solid-phase epitaxy, intense electroluminescence is observed up to room temperature. The dependence of the electroluminescence intensity on the size of the nanocrystallites is studied.

Epitaxial growth of silicon on silicon implanted with iron ions and optical properties of resulting structures

The method of ultrahigh-vacuum low-temperature (T = 850°C) purification of silicon single crystals having the (100) and (111) orientation and implanted with low-energy (E = 40 keV) iron ions with various doses (Φ = 1015−1.8×1017 cm−2) and subjected to pulsed ion treatment (PIT) in a silicon atom flow has been tested successfully. The formation of semiconducting iron disilicide (β-FeSi2) near the surface after PIT is confirmed for a Si(100) sample implanted with the highest dose of iron ions. The possibility of obtaining atomically smooth and reconstructed silicon surfaces is demonstrated. Smooth epitaxial silicon films with a roughness on the order of 1 nm and a thickness of up to 1.7 μm are grown on samples with an implantation dose of up to 1016 cm−2. Optical properties of the samples before and after the growth of silicon layers are studied; the results indicate high quality of the grown layers and the absence of iron disilicide on their surface.

Formation, structure and optical properties of nanocrystalline BaSi2 films on Si(111) substrate

BaSi2 thin films were formed on Si (111) substrate by solid-phase epitaxy (SPE) (UHV deposition) using the template technology followed by vacuum annealing at temperatures of 600 °C and 750 °C. After the deposition and annealing barium silicide films were characterized by Auger electron spectroscopy, grazing incidence x-ray diffraction (GIXRD) and atomic-force microscopy (AFM). It was established that the films annealed at T = 600 °C are polycrystalline with the structure of the orthorhombic BaSi2, with grain sizes of 100-200 nm. Higher anneal temperature (T=750 °C) leads to increase of diffraction peak intensity of BaSi2 phase with grain coagulation into 300-400 nm islands. It was confirmed that nanocrystalline BaSi2 films are characterized by a direct fundamental interband transition at 1.3 eV, the second interband transition with an energy of 2.0 eV, own phonon structure with wave number peaks at 112, 119, 146 and 208 cm-1 and a high density of defect states within the band gap, which provide a noticeable subband absorption at energies of 0.8 – 1.1 eV.

Effect of the chromium layer thickness on the morphology and optical properties of heterostructures Si(111)/(CrSi2 nanocrystallites)/Si(111)

Growth and the optical properties of epitaxial heterostructures Si(111)/(CrSi2 nanocrystallites)/Si(111) based on nanosized islands of chromium disilicide (CrSi2) on Si(111) were studied using low-energy electron diffraction, atomic-force microscopy, and optical reflection and transmission spectroscopy. The heterostructures with thicknesses of 0.1, 0.3, 0.6, 1.0, and 1.5 nm were formed by reactive epitaxy at a temperature of 500°C followed by the epitaxial growth of silicon at 750°C. The specific features of changes in the density and sizes of CrSi2 islands on the silicon surface were determined at T = 750°C as the chromium layer thickness was increased. It was established that, in the heterostructures with chromium layer thicknesses exceeding 0.6 nm, a small part of faceted Cr2Si2 nanocrystallites (NCs) emerge into near-surface region of the silicon, which is confirmed by the data from optical reflectance spectroscopy and an analysis of the spectral dependence of the absorption coefficient. A critical size of NCs is shown to exist above which their shift to the silicon surface is hampered. The decreased density of emerging NCs at chromium layer thicknesses of 1.0–1.5 nm is associated with the formation of coarser NCs within a silicon layer, which is confirmed by the data from differential reflection spectroscopy.

Formation of CrSi2 nanoislands on Si(111)7 × 7 and epitaxial growth of silicon overlayers in Si(111)/CrSi2 nanocrystallites/Si heterostructures

Low-energy electron diffraction and differential reflectance spectroscopy are used to study the self-formation of chromium disilicide (CrSi2) nanoislands on a Si(111) surface. The semiconductor properties of the islands show up even early in chromium deposition at a substrate temperature of 500°C, and the two-dimensional growth changes to the three-dimensional one when the thickness of the chromium layer exceeds 0.06 nm. The maximal density of the islands and their sizes are determined. The MBE growth of silicon over the CrSi2 nanoislands is investigated, an optimal growth temperature is determined, and 50-nm-thick atomically smooth silicon films are obtained. Ultraviolet photoelectron spectroscopy combined with the ion etching of the specimens with embedded nanocrystallites demonstrates the formation of the valence band, indicating the crystalline structure of the CrSi2. Multilayer epitaxial structures with embedded CrSi2 nanocrystallites are grown.