Dae-Gyun Lee

Emission factors of air toxics from semiconductor manufacturing in Korea

Abstract The development of local, accurate emission factors is very important for the estimation of reliable national emissions and air quality management. For that, this study is performed for pollutants released to the atmosphere with source-specific emission tests from the semiconductor manufacturing industry. The semiconductor manufacturing industry is one of the major sources of air toxics or hazardous air pollutants (HAPs); thus, understanding the emission characteristics of the emission source is a very important factor in the development of a control strategy. However, in Korea, there is a general lack of information available on air emissions from the semiconductor industry. The major emission sources of air toxics examined from the semiconductor manufacturing industry were wet chemical stations, coating applications, gaseous operations, photolithography, and miscellaneous devices in the wafer fabrication and semiconductor packaging processes. In this study, analyses of emission characteristics, and the estimations of emission data and factors for air toxics, such as acids, bases, heavy metals, and volatile organic compounds from the semiconductor manufacturing process have been performed. The concentration of hydrogen chloride from the packaging process was the highest among all of the processes. In addition, the emission factor of total volatile organic compounds (TVOCs) for the packaging process was higher than that of the wafer fabrication process. Emission factors estimated in this study were compared with those of Taiwan for evaluation, and they were found to be of similar level in the case of TVOCs and fluorine compounds.

Comparison of CMAQ Ozone Simulations with Two Chemical Mechanisms (SAPRC99 and CB05) in the Seoul Metropolitan Region

A comparison of ozone simulations in the seoul metropolitan region (SMR) using the community multiscale air quality (CMAQ) model with SAPRC99 and CB05 chemical mechanisms (i.e. EXP-SP99 and EXP-CB05) has been conducted during four seasons of 2012. The model results showed that the differences in average ozone concentrations between the EXP-SP99 and EXP-CB05 were found to be large in summer, but very small in the other seasons. This can be attributed that the SAPRC99 tends to produce more ozone than the CB05 in urban area like the SMR with low VOC/NOx ratio under high ozone conditions. Through quantitative comparison between two mechanisms for the summer, it was found that the average ozone concentrations from the EXP-SP99 were about 3 ppb higher than those from the EXP-CB05 and agreed well with the observations. Horizontal differences in ozone concentrations between SAPRC99 and CB05 showed that significant differences were found in southern part of the SMR and over the sea near the coast in summer.

Estimation of Particulate Matter Emission Factors from Open Burning

It is very important to investigate air pollutants and emissions emitted from open burning in order to control nonpoint sources effectively. In this study, we utilized incineration simulator proposed by U.S. EPA and investigated concentrations of TSP, PM10, PM2.5 from woods and household wastes burning to calculate emission factors and build emission inventories. The results of experiment with 15 kg of woods and 3 kg of household wastes using the incineration simulator were as follows: in case of woods burning, TSP concentration was , PM10 concentration was , PM2.5 concentration was , respectively; in case of household wastes burning, TSP concentration was , PM10 concentration was , PM2.5 concentration was , respectively. Concentrations from household burning, as stated above, were higher than those from woods burning. Emission factors (EFs) for woods and household wastes burning were calculated as 2.45 and 6.75 g/kg for TSP, 0.86 and 5.45 g/kg for PM10, 0.78 and 4.81 g/kg for PM2.5, respectively. EFs of TSP, PM10, PM2.5 calculated from household wastes burning were higher than those of woods burning. When we added PM emissions from woods burning and household wastes burning to Korean National Emission Inventory named as Clean Air Policy Support System (CAPSS), CAPSS annual emissions of TSP, PM10, PM2.5 were increased by 0.08~0.26% (An increase rate for TSP, PM10, PM2.5 were 0.08~0.10%, 0.16~0.20% and 0.18~0.26%, respectively). Note that we assumed that the 1% of household wastes is emitted by open burning.

Methodology of Application to Air Quality Model to Evaluate the Results of the Enforcement Plan in Seoul Metropolitan Area

The Government had devised legislation of Special Act and drew up guidelines for improving air quality in Seoul Metropolitan area. In 2007 local government of Seoul, Incheon and Gyeonggi conducted the results of application policy by reduced air pollutants emission for the first time. Although there was reduction of air pollutant emission in each local government, it was ineffective as expected using air pollution monitoring database. Therefore we worked out a way to prepare modeling input data using the results of enforcement plan. And we simulated surface and PM10 before and after decrease in air pollutants emission and examine reduction effects of air pollution according to enforcement regulation except other influence, by using MM5-SMOKE-CMAQ system. Each local government calculated the amount of emission reduction under application policy, and we developed to prepare input data so as to apply to SMOKE system using emission reduction of enforcement plan. Distribution factor of emission reduction were classified into detailed source and fuel codes using code mapping method in order to allocate the decreased emission. The code mapping method also included a way to allocate spatial distribution by CAPSS distribution. According to predicted result using the reduction of NOx emission, concentration was decreased from 19.1 ppb to 18.0 ppb in Seoul. In Gyeonggi and Incheon concentrations were down to 0.65 ppb and 0.68 ppb after application of enforcement plan. PM10 concentration was reduced from 18.2 to 17.5 in Seoul. In Gyeonggi PM10 concentration was down to 0.51 and in Incheon PM10 concentration was decreased about 0.47 which was the lower concentration than any other cities.

Development of CAPSS2SMOKE Program for Standardized Input Data of SMOKE Model

The Community Multiscale Air Quality (CMAQ) model is capable of providing high quality atmospheric chemistry profiles through the utilization of high-resolution meteorology and emissions data. However, it cannot simulate air quality accurately if input data are not appropriate and reliable. One of the most important inputs required by CMAQ is the air pollutants emissions, which determines air pollutants concentrations during the simulation. For the CMAQ simulation of Korean peninsula, we, in general, use the Korean National Emission Inventory data which are estimated by Clean Air Policy Support System (CAPSS). However, since they are not provided by model-ready emission data, we should convert CAPSS emissions into model-ready data. The SMOKE is the emission model we used in this study to generate CMAQ-ready emissions. Because processing the emissions data is very monotonous and tedious work, we have developed CAPSS2SMOKE program to convert CAPSS emissions into SMOKE-ready data with ease and effective. CAPSS2SMOKE program consists of many codes and routines such as source classification code, to ratio code, map projection conversion routine, spatial allocation routine, and so on. To verify the CAPSS2SMOKE program, we have run SMOKE using the CAPSS 2009 emissions and found that the SMOKE results inherits CAPSS emissions quite well.