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Daisuke Hara

Hitachi

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Publication

Featured researches published by Daisuke Hara.

Archive | 2011

Substrate processing apparatus and semiconductor device manufacturing method

Takatomo Yamaguchi; Akinori Tanaka; Daisuke Hara

Archive | 2011

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SUBSTRATE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Kenji Shirako; Masanao Fukuda; Takafumi Sasaki; Yoshinori Imai; Daisuke Hara; Shuhei Saido; Koei Kuribayashi

Archive | 2012

SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SUBSTRATE

Daisuke Hara; Takeshi Itoh; Masanao Fukuda; Takatomo Yamaguchi; Hiroaki Hiramatsu; Shuhei Saido; Takafumi Sasaki

Archive | 2011

Substrate processing apparatus , method of manufacturing semiconductor device, and method of manufacturing substrate

Yukitomo Hirochi; Akinori Tanaka; Akihiro Sato; Takeshi Itoh; Daisuke Hara; Kenji Shirako; Kazuhiro Morimitsu; Masanao Fukuda

Archive | 2012

SUBSTRATE PROCESSING APPARATUS, WAFER HOLDER, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Masanao Fukuda; Takafumi Sasaki; Takatomo Yamaguchi; Daisuke Hara

Archive | 2014

Vaporizer for substrate processing apparatus

Hideto Tateno; Daisuke Hara; Masahisa Okuno; Takuya Joda

Archive | 2011

FILM FORMING APPARATUS, WAFER HOLDER, AND FILM FORMING METHOD

Daisuke Hara; Kazuhiro Shimura; Masaki Murobayashi; Yukitomo Hirochi

Archive | 2012

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SUBSTRATE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Shuhei Saido; Daisuke Hara; Takafumi Sasaki

Archive | 2017

VAPORISATEUR, APPAREIL DE TRAITEMENT DE SUBSTRAT ET PROCÉDÉ DE FABRICATION DE DISPOSITIF À SEMI-CONDUCTEUR

Hideto Tateno; 立野 秀人; Akinori Tanaka; 田中 昭典; Daisuke Hara; 原 大介; Masahisa Okuno; 奥野 正久; Takuya Joda; 定田 拓也; Takashi Tsukamoto; 塚本 剛史; Sadayoshi Horii; 堀井 貞義; Toru Kakuda; 角田 徹

Archive | 2017

Heat insulating unit for substrate processing apparatus

Hideto Tateno; Daisuke Hara

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Collaboration

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Akinori Tanaka

Hitachi

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Masanao Fukuda

Hitachi

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Takafumi Sasaki

Hitachi

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Takatomo Yamaguchi

Hitachi

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Hideto Tateno

Hitachi

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Kenji Shirako

Hitachi

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Masahisa Okuno

Hitachi

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Shuhei Saido

Hitachi

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Yoshinori Imai

Hitachi

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Takeshi Itoh

Hitachi

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