Daisuke Kishimoto

Effects of an Initial Layer on Co-Cr Films Sputtered on Continuous Film Substrates

Co-Cr films were fabricated by the targets facing type of sputtering method. It was already reported [2] that the smaller the initial incident angle (¿<inf>init</inf>), the better the magnetic properties and cryrstal orientation of the films. Mass production usually requires a large ¿<inf>init</inf>. A double-layered Co-Cr film was fabricated with a small ¿<inf>init</inf> (¿<inf>init</inf>-1) for the first layer and a large ¿<inf>init</inf> (¿<inf>init</inf>-2) for the second layer. It was found that when the first layer was moore than 0.01 ¿m thick, the second layer grows in an epitaxial formation and the crystal orientation of the double-layered film is much better than that of a single-layered film with a large ¿<inf>init</inf>.