Daniel Eduardo Weibel

Self-Organized TiO2 Nanotube Arrays: Synthesis by Anodization in an Ionic Liquid and Assessment of Photocatalytic Properties

Self-organized TiO(2) nanotube (NT) arrays were produced by anodization in ethylene glycol (EG) electrolytes containing 1-n-butyl-3-methyl-imidazolium tetrafluoroborate (BMI.BF(4)) ionic liquid and water. The morphology of the as-formed NTs was considerably affected by changing the anodization time, voltage, and water and ionic liquid electrolyte concentrations. In general, a nanoporous layer was formed on the top surface of the TiO(2) NTs, except for anodization at 100 V with 1 vol % of BMI.BF(4), where the NTs mouth was revealed. The length and bottom diameter of the NTs as well as the pore diameter of the top layer showed a linear relationship with increased anodization voltage. These TiO(2) NTs were tested as photocatalysts for methyl orange photodegradation and hydrogen evolution from water/methanol solutions by UV light irradiation. The results show that the TiO(2) NTs obtained by anodization in EG/H(2)O/BMI.BF(4) electrolytes are active and efficient for both applications.

Growth of TiO2 nanotube arrays with simultaneous Au nanoparticles impregnation: photocatalysts for hydrogen production

Um novo metodo para a fabricacao de nanotubos (NTs) de TiO 2 organizados e impregnados com nanoparticulas (NPs) de ouro foi desenvolvido, e as propriedades estruturais, morfologicas e opticas dos NTs obtidos foram investigadas. Os arranjos de NTs de TiO 2 foram crescidos pela oxidacao anodica de Ti metalico utilizando solucoes eletroliticas contendo ions fluoreto e NPs de Au. As estruturas resultantes foram caracterizadas por espectrometria de retroespalhamento Rutherford (RBS), difratometria de raios X com incidencia rasante (GIXRD), microscopias eletronicas de transmissao (TEM) e de varredura (SEM) e espectroscopia UV-Vis. Tanto os arranjos de NTs sem Au quanto os impregnados com Au mostraram atividade fotocatalitica boa e estavel na geracao de hidrogenio a partir de misturas agua/metanol. Os nanotubos de TiO 2 contendo Au foram mais ativos na fotogeracao de hidrogenio do que os NTs de TiO 2 sem Au. A novel method for the fabrication of TiO 2 nanotubes (NTs) impregnated with gold nanoparticles (NPs) is reported. TiO 2 NT arrays were grown by anodic oxidation of Ti metal using fluoride electrolytes containing Au NPs. Resulting structures were characterized by Rutherford backscattering spectrometry (RBS), grazing incidence X-ray diffractometry (GIXRD), transmission and scanning electron microscopy (SEM and TEM) and UV-Vis spectroscopy. Au-free and Au-impregnated TiO 2 NT arrays showed good and stable photocatalytic activity for hydrogen generation from water/methanol solutions. Au-containing TiO 2 NTs presented higher hydrogen photogeneration activity than Au-free TiO 2 NTs.

Radiation-Sensitive Novel Polymeric Resist Materials: Iterative Synthesis and Their EUV Fragmentation Studies

Polymerization of (4-(methacryloyloxy)phenyl)dimethylsulfoniumtriflate (MAPDST), as a key monomer containing the radiation sensitive sulfonium functionality, with various other monomers such as methyl methacrylate (MMA), 4-carboxy styrene (STYCOOH), N-vinyl carbazole (NVK) in different molar ratios via free-radical polymerization method is described. This methodology led to the development of a small chemical library of six different radiation sensitive polymers for lithography applications. Fourier transform infrared (FT-IR) and nuclear magnetic resonance (NMR) spectroscopy identified the reaction products as MAPDST homopolymer and MAPDST-MMA, MAPDST-STYCOOH, MAPDST-NVK copolymers. Molecular weights were obtained from gel permeation chromatography and the decomposition temperature (Td) values were determined using thermogravimetric analysis (TGA). The effect of extreme ultraviolet (EUV) irradiation on a thin poly(MAPDST) film was investigated using monochromatic synchrotron excitation. These new polymeric materials were also exposed to electron-beam lithography (EBL) and extreme ultraviolet lithography (EUVL) to achieve 20-nm line patterns.

Hybrid tantalum oxide nanoparticles from the hydrolysis of imidazolium tantalate ionic liquids: efficient catalysts for hydrogen generation from ethanol/water solutions

The reaction of equimolar amounts of 1-n-butyl-3-methylimidazolium chloride (BMI·Cl) or 1-n-decyl-3-methylimidazolium chloride (DMI·Cl) with TaCl5 affords imidazolium tantalate ionic liquids (ILs) BMI·TaCl61 and DMI·TaCl62. The hydrolysis of ILs 1 and 2 yields hybrid-like tantalum oxide nanoparticles (NPs) with size distribution dependent on the nature of the IL used (3.8–22 nm from IL 1 and 1.5–6 nm from 2). A significant aggregation/agglomeration of the particles was observed after the removal of the IL content of the hybrid material by calcination, forming predominantly large particles (mainly bulk tantalum oxides). These new hybrid-like Ta2O5/IL NPs are highly active photocatalyst nanomaterials for hydrogen production by reforming of ethanol at ambient temperature. Hydrogen evolution rates up to 7.2 mmol H2 g−1 h−1 and high apparent quantum yields up to 17% were measured. The hybrid-like Ta2O5/IL NPs sputtered-decorated with ultra-small Pt NPs (1.0 ± 0.3 nm) as co-catalysts reached activities leading to even higher hydrogen production (9.2 H2 mmol g−1 h−1; apparent quantum yield of 22%). The calcined materials (with or without Pt NPs) showed much lower photocatalytic activity under the same reaction conditions (up to 2.8 mmol g−1 of H2). The remarkable activity of the hybrid-like Ta2O5/IL NPs may be related to the presence of the remaining IL that provides hydrophilic regions, facilitating the approach of polar molecules (water and alcohol) to the semiconductor active photocatalytic sites.

Micro and Nano-Texturization of Intermetallic Oxide Alloys by a Single Anodization Step: Preparation of Artificial Self-Cleaning Surfaces

Micro- and nanostructures of Ti-γCu (γ = 0, 30, 50, 70, and 100 wt %) intermetallic alloys were produced through a single anodization step. It was found that the original alloy composition influences the final oxide morphology obtained after anodization which presented formation of a microstructure with nanotubes, nanoparticles or nanopillars on the surface. Pure Ti and Cu oxide metals and their alloys presented hydrophilic or superhydrophilic properties immediately after anodization. When the anodized pure metal and/or Ti-γCu surfaces were functionalized with trimethoxypropylsilane (TPMSi), by dipping and coating with a thin perfluorinated layer, the treated substrates became in all cases superhydrophobic (water contact angles in the range of 152-166°), showing excellent self-cleaning properties with hysteresis below 3°. These results can be explained by a combination of nanomicro morphologies with low surface energy compounds in the topmost monolayers. The decrease in hysteresis was associated with a higher M-OH bond concentration on the anodized surfaces, which allowed for more complete TMPSi coating coverage. This study also indicates that easy and effective fabrication of superhydrophobic surfaces in pure metals and alloys is possible without involving traditional multistep processes.

Performance evaluation of nonchemically amplified negative tone photoresists for e-beam and EUV lithography

Abstract. Although extreme ultraviolet (EUV) lithography is being considered as one of the most promising next-generation lithography techniques for patterning sub-20 nm features, the development of suitable EUV resists remains one of the main challenges confronting the semiconductor industry. The goal is to achieve sub-20 nm line patterns having low line edge roughness (LER) of <1.8  nm and a sensitivity of 5 to 20  mJ/cm2. The present work demonstrates the lithographic performance of two nonchemically amplified (n-CARs) negative photoresists, MAPDST homopolymer and MAPDST-MMA copolymer, prepared from suitable monomers containing the radiation sensitive sulfonium functionality. Investigations into the effect of several process parameters are reported. These include spinning conditions to obtain film thicknesses <50  nm, baking regimes, exposure conditions, and the resulting surface topographies. The effect of these protocols on sensitivity, contrast, and resolution has been assessed for the optimization of 20 nm features and the corresponding LER/line width roughness. These n-CARs have also been found to possess high etch resistance. The etch durability of MAPDST homopolymer and MAPDST-MMA copolymer (under SF6 plasma chemistry) with respect to the silicon substrate are 7.2∶1 and 8.3∶1, respectively. This methodical investigation will provide guidance in designing new resist materials with improved efficiency for EUVL through polymer microstructure engineering.

Selective surface functionalization of polystyrene by inner-shell monochromatic irradiation and oxygen exposure

The surfaces of polystyrene (PS) thin films were selectively functionalized by a combination of monochromatic synchrotron radiation with oxygen exposure. By selecting specific K-shell excitation energies, it was shown that highly efficient surface functionalization can be obtained. After the treatments, several oxygen functionalities were detected by XPS and NEXAFS spectroscopy. The functionalization strongly depended on the excitation energy. C 1s → σ*C–C transitions produced an extremely efficient oxidation of the uppermost monolayer of the PS films. The COO and CO elemental contributions in the C 1s envelope at the PS surface was higher than 70%. On the contrary, other excitation energies did not introduce COO functionalities efficiently. The obtained results were explained by taking into account the known Auger stimulated desorption mechanism. The present research will open new ways to functionalize a polymer surface by a combination of monochromatic inner-shell excitation together with exposure to a reactive gas atmosphere.

Biodegradation improvement of poly(3-hydroxy-butyrate) films by entomopathogenic fungi and UV-assisted surface functionalization

Ultraviolet (UV)-assisted surface modification in the presence of oxygen was used as initial step to achieve controlled degradation of poly(3-hydroxy-butyrate), PHB, films by entomopathogenic fungi. Treated surfaces were investigated by surface analysis techniques (water contact angle, Fourier Transformed Infrared Spectroscopy in Attenuated Total Reflectance mode, X-ray Photoelectron Spectroscopy, Near-edge X-ray Absorption Fine Structure, Gel Permeation Chromatography, Optical Microscopy, Scanning Electron Microscopy, and weight loss). After the UV-assisted treatments, new carbonyl groups in new chemical environments were detected by XPS and NEXAFS spectroscopy. The oxidizing atmosphere did not allow the formation of CC bonds, indicating that Norrish Type II mechanism is suppressed during or by the treatments. The higher hydrophilicity and concentration of oxygenated functional groups at the surface of the treated films possibly improved the biodegradation of the films. It was observed a clear increase in the growth of this fungus when oxygenated groups were grafted on the polymers surfaces. This simple methodology can be used to improve and control the degradation rate of PHB films in applications that require a controllable degradation rate.

Wettability and cell spreading enhancement in poly(sulfone) and polyurethane surfaces by UV-assisted treatment for tissue engineering purposes

The surface of Poly(sulfone) (PSU) and Polyurethane (PU) films were treated with ultraviolet (UV) light in the presence of oxygen to improve their wettability, adhesion and cell spreading properties. XPS and WCA results illustrated the effective conversion of the PSU and PU surfaces from hydrophobic to hydrophilic with grafting of new oxidized functional groups during the photochemical treatments. Treated films showed a larger number of adhered cells compared to the untreated films and that number of adhered cells was comparable to the number of adhered cells in the control group. The results showed that the cell response does not only depend on the hydrophilicity but on the chemical surface alterations which occur as a result of UV-assisted treatment in the presence of oxygen. Better cell adhesion, spreading and growing on the PSU and PU substrates modified by the present UV methodology confirmed the biocompatibility of the treated surfaces.

Polymer Surface Functionalization Using Plasma, Ultraviolet and Synchrotron Radiation

Polyurethane (PU) and polystyrene (PS) films were functionalized by ultraviolet (UV) or selective synchrotron radiations (SR) in the presence of reactive gases. The UV-PU results were compared with lowpressure plasma treatments of the same films. Oxygen or acrylic acid vapours (AA) were used as reactive gases. X-ray photoelectron spectroscopy measurements of UV modified films in the presence of oxygen or AA matched the RF-plasma treatments results. It is shown that COO and C=O functional groups were incorporated at the polymer surface efficiently with both methodologies. In addition, near-edge X-ray absorption fine structure showed that a thin film of poly(acrylic acid) is formed over the PU and PS films during the UV irradiation in the presence of AA vapours. These results resemble previous AA low-power plasma treatments. PU and PS films were also selectively functionalized by SR using oxygen as reactive gas. Surface concentrations of COO and C=O functional groups were enhanced by C1s → σ* C–C excitation after irradiation and oxygen introduction. This efficient surface functionalization was clearly observed in PS films which do not have CO and COO groups in their molecular structure. Excitations involving transitions to π* orbital (π*C=C, π*C=O) led to much lower functionalization efficiency. The SR results can be explained by taking into account previous photon stimulated ion desorption studies of polymers. SR results may open new ways to functionalize polymer surfaces selectively and efficiently.