Daniel Herrmann

Thermally Decoupled Micro-Structured Reference Element for Sensors

Microstructured temperature sensor element for spatially resolved detection of infrared radiation, has infrared radiation absorbing layer arranged on passivation layer, where absorbing layer is isolated from gas phase

Mikromechanischer Thermopile-Sensor und Verfahren zu seiner Herstellung

Process for packaging a MEMS component

Thermisch entkoppeltes mikrostrukturiertes Referenzelement für Sensoren

Sensor system and method for operating a sensor system

Micromechanical thermopile sensor and method for producing same

Système de capteur et procédé de fonctionnement associé

Sensor arrangement and method for operating a sensor arrangement

Radiation sensor i.e. infrared sensor, has thermopiles array on substrate with six-cornered membrane surfaces which form hexagonal arrangement without free space between individual membrane surfaces