Daniel Kjær

Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions

In this comparative study, the authors demonstrate the relationship∕correlation between macroscopic and microscopic four-point sheet resistance measurements on laser annealed ultra-shallow junctions (USJs). Microfabricated cantilever four-point probes with probe pitch ranging from 1.5to500μm have been used to characterize the sheet resistance uniformity of millisecond laser annealed USJs. They verify, both experimentally and theoretically, that the probe pitch of a four-point probe can strongly affect the measured sheet resistance. Such effect arises from the sensitivity (or “spot size”) of an in-line four-point probe. Their study shows the benefit of the spatial resolution of the micro four-point probe technique to characterize stitching effects resulting from the laser annealing process.

Revealing origin of quasi-one dimensional current transport in defect rich two dimensional materials

The presence of defects in graphene have for a long time been recognized as a bottleneck for its utilization in electronic and mechanical devices. We recently showed that micro four-point probes may be used to evaluate if a graphene film is truly 2D or if defects in proximity of the probe will lead to a non-uniform current flow characteristic of lower dimensionality. In this work, simulations based on a finite element method together with a Monte Carlo approach are used to establish the transition from 2D to quasi-1D current transport, when applying a micro four-point probe to measure on 2D conductors with an increasing amount of line-shaped defects. Clear 2D and 1D signatures are observed at low and high defect densities, respectively, and current density plots reveal the presence of current channels or branches in defect configurations yielding 1D current transport. A strong correlation is found between the density filling factor and the simulation yield, the fraction of cases with 1D transport and the mean sheet conductance. The upper transition limit is shown to agree with the percolation threshold for sticks. Finally, the conductance of a square sample evaluated with macroscopic edge contacts is compared to the micro four-point probe conductance measurements and we find that the micro four-point probe tends to measure a slightly higher conductance in samples containing defects.

On performance limitations and property correlations of Al-doped ZnO deposited by radio-frequency sputtering

The electrical properties of RF-sputtered Al-doped ZnO are often spatially inhomogeneous and strongly dependent on deposition parameters. In this work, we study the mechanisms that limit the minimum resistivity achievable under different deposition regimes. In a low- and intermediate-pressure regime, we find a generalized dependence of the electrical properties, grain size, texture, and Al content on compressive stress, regardless of sputtering pressure or position on the substrate. In a high-pressure regime, a porous microstructure limits the achievable resistivity and causes it to increase over time as well. The primary cause of inhomogeneity in the electrical properties is identified as energetic particle bombardment. Inhomogeneity in oxygen content is also observed, but its effect on the electrical properties is small and limited to the carrier mobility.

Characterization of positional errors and their influence on micro four-point probe measurements on a 100 nm Ru film

Thin-film sheet resistance measurements at high spatial resolution and on small pads are important and can be realized with micrometer-scale four-point probes. As a result of the small scale the measurements are affected by electrode position errors. We have characterized the electrode position errors in measurements on Ru thin film using an Au-coated 12-point probe. We show that the standard deviation of the static electrode position error is on the order of 5 nm, which significantly affects the results of single configuration measurements. Position-error-corrected dual-configuration measurements, however, are shown to eliminate the effect of position errors to a level limited either by electrical measurement noise or dynamic position errors. We show that the probe contact points remain almost static on the surface during the measurements (measured on an atomic scale) with a standard deviation of the dynamic position errors of 3 A. We demonstrate how to experimentally distinguish between different sources of measurement errors, e.g. electrical measurement noise, probe geometry error as well as static and dynamic electrode position errors.

Fast static field CIPT mapping of unpatterned MRAM film stacks

While investigating uniformity of magnetic tunnel junction (MTJ) stacks we find experimentally and analytically that variation in the resistance area product (RA) is more important to monitor as compared to the tunnel magnetoresistance (TMR), which is less sensitive to MTJ variability. The standard Current In-Plane Tunneling (CIPT) method measures both RA and TMR, but the usefulness for uniformity mapping, e.g. for tool optimization, is limited by excessive measurement time. Thus, we develop and demonstrate a fast complementary static magnetic field method focused only on measurement of RA. We compare the static field method to the standard CIPT method and find perfect agreement between the extracted RA values and measurement repeatability while the static field method is several times faster. The static field CIPT method is demonstrated for 200 mm wafer mapping showing radial as well as asymmetrical variations related to the MTJ deposition conditions.

Flexible SiO2 cantilevers for torsional self-aligning micro scale four-point probes

In order to successfully measure the conductivity of a sample with a four-point probe, good alignment of the electrodes to the sample is important to establish even contact pressure and contact areas of the electrodes. By incorporating a hinge in a microfabricated SiO2 mono-cantilever the ability to compensate for misalignment is improved at a cost of reduced spring constant. Analytical calculations, numerical simulations on cantilever deflection and comparison with experimental results indicate that a reasonable compromise between torsional flexibility and overall spring constant can be achieved by proper dimensioning and placement of the hinge. Furthermore, it is shown that polymeric macro scale cantilever models can provide a fast and reliable understanding of the mechanical deflection properties of microfabricated SiO2 cantilevers.

Characterization of magnetic tunnel junction test pads

We show experimentally as well as theoretically that patterned magnetic tunnel junctions can be characterized using the current-in-plane tunneling (CIPT) method, and the key parameters, the resistance-area product (RA) and the tunnel magnetoresistance (TMR), can be determined. The CIPT method relies on four-point probe measurements performed with a range of different probe pitches and was originally developed for infinite samples. Using the method of images, we derive a modified CIPT model, which compensates for the insulating boundaries of a finite rectangular sample geometry. We measure on square tunnel junction pads with varying sizes and analyze the measured data using both the original and the modified CIPT model. Thus, we determine in which sample size range the modified CIPT model is needed to ensure validity of the extracted sample parameters, RA and TMR. In addition, measurements as a function of position on a square tunnel junction pad are used to investigate the sensitivity of the measurement results to probe misalignment.