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Daniel Maurer

Infineon Technologies

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Publication

Featured researches published by Daniel Maurer.

Sensors and Actuators A-physical | 2016

Inductively-coupled plasma-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbide thin films for MEMS

Tobias Frischmuth; Michael Schneider; Daniel Maurer; Thomas Grille; Ulrich Schmid

Thin Solid Films | 2016

High temperature annealing effects on the chemical and mechanical properties of inductively-coupled plasma-enhanced chemical vapor deposited a-SiC:H thin films

Tobias Frischmuth; Michael Schneider; Daniel Maurer; Thomas Grille; Ulrich Schmid

Procedia Engineering | 2015

Impact of Thermal Treatment on the Residual Stress and Young's Modulus of thin a-SiC:H Membranes Applying Bulge Testing☆

Tobias Frischmuth; Michael Schneider; Daniel Maurer; Thomas Grille; Ulrich Schmid

Thin Solid Films | 2016

Low temperature deposition of a-SiC:H thin films applying a dual plasma source process

Tobias Frischmuth; Michael Schneider; Iva Bogdanović Radović; Zdravko Siketić; Daniel Maurer; Thomas Grille; Ulrich Schmid

Archive | 2016

Micromechanical Structure and Method for Fabricating the Same

Ulrich Schmid; Tobias Frischmuth; Peter Irsigler; Thomas Grille; Daniel Maurer; Ursula Hedenig; Markus Kahn; Guenter Denifl; Michael Schneider

Archive | 2016

Mikromechanische Struktur und Verfahren zur Herstellung derselben

Guenter Denifl; Tobias Frischmuth; Thomas Grille; Ursula Hedenig; Peter Irsigler; Markus Kahn; Daniel Maurer; Ulrich Schmid

Archive | 2012

Method for Processing a Wafer at Unmasked Areas and Previously Masked Areas to Reduce a Wafer Thickness

Thomas Grille; Ursula Hedenig; Martin Zgaga; Daniel Maurer

Archive | 2012

Processing a sacrificial material during manufacture of a microfabricated product

Guenther Denifl; Daniel Maurer; Thomas Grille; Joachim Hirschler; Markus Kahn

Archive | 2018

MICROMECHANICAL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

Tobias Frischmuth; Guenter Denifl; Thomas Grille; Ursula Hedenig; Markus Kahn; Daniel Maurer; Ulrich Schmid; Michael Schneider

Archive | 2016

Mikromechanische Struktur und Verfahren zur Herstellung derselben Micromechanical structure and method of producing same

Guenter Denifl; Tobias Frischmuth; Thomas Grille; Ursula Hedenig; Peter Irsigler; Markus Kahn; Daniel Maurer; Ulrich Schmid; Michael Schneider

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Thomas Grille

Infineon Technologies

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Ursula Hedenig

Infineon Technologies

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Markus Kahn

Infineon Technologies

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Tobias Frischmuth

Vienna University of Technology

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Ulrich Schmid

Vienna University of Technology

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Peter Irsigler

Infineon Technologies

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Guenter Denifl

Infineon Technologies

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Joachim Hirschler

Infineon Technologies

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Michael Schneider

Airbus

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Andre Brockmeier

Infineon Technologies

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