David Bouyge

Split Ring Resonators (SRRs) Based on Micro-Electro-Mechanical Deflectable Cantilever-Type Rings: Application to Tunable Stopband Filters

A new principle for the implementation of tunable split ring resonators (SRRs) is presented. The rings forming the SRRs are partly fixed to the substrate (anchor) and partly suspended (up-curved cantilever). Through electrostatic actuation, the suspended parts are deflected down, the distributed capacitance between the pair of coupled rings is modified, and hence the resonance frequency of the SRR can be electrically tuned. To obtain electrically movable rings, a cantilever-type micro-electro-mechanical-system (MEMS) design and fabrication process is applied. The resonance frequencies at the different switching states are measured by coupling the tunable SRR to a host microstrip line, and reveal that significant tuning ranges can be achieved. This novel tuning concept is applied to the implementation of tunable stopband filters at Ku band as proof-of-concept demonstrators.

A Wide Tuning Range MEMS Switched Patch Antenna

This paper describes a novel wide tuning range switched MEMS patch antenna. The proposed component uses wrapped metallization, which can be pressed in contact to a silicon substrate. The antenna operates at 23.8GHz unbiased, and 12.4GHz with 150 volts applied. Matching could be maintained in both configurations, using a simple design methodology

Surface and bulk micromachined RF MEMS capacitive series switch for watt-range hot switching operation

This paper presents a novel RF MEMS capacitive series switch fabricated on a high-resistivity Si substrate using bulk and surface micromachining techniques. The structure is optimized for achieving watt-range power handling capabilities in hot switching operation by avoiding the appearance of RF latching phenomena. It can be designed for working at S and C- band. Thus, the switch has been fabricated and tested showing a good RF performance in the chosen frequency band. Pull-in and hold-down voltages have been measured for RF input powers ranging from 0.1 - 5 W at 10 GHz showing the significant shift on the maximum RF power without stiction achieved by our structure. Finally, switch reliability has been tested over 10.5 million cycles at 5 W without noticeable degradation.

8 ns pulses from a compact fibre laser Q-switched by MOEMS

We report on active Q-switching of Ytterbium-doped fibre laser using a new type of deformable micro-mirror. This cantilever-type micro-mirror increases the modulation rate of the laser cavity losses while keeping a high actuating frequency. Hence, we obtained shorter pulses than 10 ns for frequencies up to 50 kHz. The maximum frequency we reached was of 800 kHz with a pulse duration of 100 ns.

Adaptive spectral selection of a super continuum source using optical MEMS for biomedical diagnosis

We present an innovative approach for digital selection of precise spectral regions from a super-continuum beam using an array of electrostatically-actuated micro-mirrors. The device allows spectral and temporal encoding of selected spectral bands.