Deng Qiling
Chinese Academy of Sciences
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Publication
Featured researches published by Deng Qiling.
Chinese Physics Letters | 2007
Shi Lifang; Dong Xiaochun; Deng Qiling; Luo Xiangang; Du Chunlei
A method of fast design and fabrication for bass-relief micro-profiles is developed by using an analytic formulation to determine the exposure distribution. Based on an equivalent exposure threshold model, the formulation is simplified for the case of bass-relief profile corresponding to the smaller exposure dose. The mask function for a microlens array is designed without iteration involved by the analytic formulation. The experiment is performed to validate the method, and the fabrication result is obtained with the profile error less than 30 nm (rms).
Archive | 2013
Gao Hongtao; Li Chuanhao; Du Chunlei; Dong Xiaochun; Deng Qiling; Shi Lifang
Archive | 2013
Du Chunlei; Xia Liangping; Yin Shaoyun; Shi Lifang; Deng Qiling; Dong Xiaochun; Zhang Yukun
Archive | 2003
Deng Qiling; Du Chunlei
Archive | 2014
Shi Lifang; Zhang Man; Deng Qiling; Hu Song; Qin Yanyun; Cao Axiu; Xia Liangping
Archive | 2014
Du Chunlei; Sun Chen; Deng Qiling; Dong Xiaochun; Gao Hongtao; Zhang Yukun
Archive | 2012
Deng Qiling; Dong Xiaochun; Du Chunlei; Shi Lifang
Archive | 2004
Zhou Chongxi; Du Chunlei; Deng Qiling
Archive | 2015
Deng Qiling; Xia Liangping; Pang Hui; Shi Lifang; Du Chunlei
Archive | 2015
Shi Lifang; Cao Axiu; Guo Shuji; Deng Qiling; Zhang Man; Pang Hui; Wang Jiazhou
