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Dive into the research topics where Dennis K. Coultas is active.

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Featured researches published by Dennis K. Coultas.


Nuclear Instruments and Methods | 1976

High current electrostatic deflector and scanner

John Howard Keller; Dennis K. Coultas; W.W. Hicks; James Robert Winnard

Abstract We have designed a high current electrostatic scanner-deflector. The scanner includes electron gates to confine the space-charge-unneutralized region to the immediate vicinity of the scanner. The remaining beam divergence due to space charge has been compensated for by the inherent focusing property of the scanner. Since this latter effect depends on the scanner length, a design may be created for a wide range of perveances. Such a scanner was successfully tested for 2 mA, 40 kV, 75 As + ion beam. This demonstrates the capability of scanning ion beam more than 10 times as intense as those normally scanned.


Physical Review Letters | 1992

Transport of dust particles in glow-discharge plasmas

Michael Scott Barnes; John Howard Keller; John C. Forster; James A. O'Neill; Dennis K. Coultas


Archive | 1992

Radio frequency induction/multipole plasma processing tool

Dennis K. Coultas; John Howard Keller


Archive | 1992

Optimized helical resonator for plasma processing

Michael Scott Barnes; Dennis K. Coultas; John G. Forster; John Howard Keller


Archive | 1991

Low energy, steered ion beam deposition system having high current at low pressure

John Howard Keller; Dennis K. Coultas


Archive | 1995

Helicon plasma processing tool utilizing a ferromagnetic induction coil with an internal cooling channel

John Howard Keller; Dennis K. Coultas


Archive | 1996

Stable matching networks for plasma tools

Dennis K. Coultas; John Howard Keller


Archive | 1991

Ceramic electrostatic wafer chuck

Michael Scott Barnes; Dennis K. Coultas; John C. Forster; John Howard Keller


Archive | 1997

Apparatus and method of producing a negative ion plasma

John Howard Keller; Dennis K. Coultas


Archive | 1994

Gettering of particles during plasma processing

Michael Scott Barnes; Dennis K. Coultas; John C. Forster; John Howard Keller; James A. O'Neill

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