Dennis W. Hess

Plasma Cleaning for Electronic, Photonic, Biological, and Archeological Applications

The focus of this review is on plasma or glow discharge cleaning technologies and their applications in industrial, biological, agricultural, and archeological fields. Examples from these diverse fields are selected to demonstrate the breadth of cleaning demands that can be met using plasma methods and to offer perspective into the unique properties of plasmas for surface cleaning. Specific examples are offered from integrated circuit and photovoltaic device manufacturing, medical and biomedical fields, restoration of historical artifacts and imaging of micro- and nano-structures. Several additional applications are described briefly to provide a more comprehensive picture of plasma cleaning applications.

Subtractive Etching of Cu with Hydrogen-Based Plasmas

Dr. Galit Levitin from the School of Chemical and Biomolecular Engineering at Georgia Tech, presented a lecture at the Nano@Tech Meeting on February 22, 2011 at 12 noon in room 1116 of the Marcus Nanotechnology Building.