Derrick C. Mancini

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

MEMS devices are currently fabricated primarily in silicon because of the available surface machining technology. A major problem with the Si-based MEMS technology is that Si has poor mechanical and tribological properties J.J. Sniegowski, in: B.

Folded waveguide traveling-wave tube sources for terahertz radiation

Microfabricated folded waveguide traveling-wave tubes (TWTs) are potential compact sources of wide-band, high-power terahertz radiation. We present feasibility studies of an oscillator concept using an amplifier with delayed feedback. Simulations of a 560-GHz oscillator and experimental evaluation of the concept at 50 GHz are presented. Additionally, results from various fabrication methods that are under investigation, such as X-ray lithography, electroforming, and molding (LIGA), UV LIGA, and deep reactive ion etching are presented. Observations and measurements are reported on the generation of stable single-frequency oscillation states. On varying the feedback level, the oscillation changes from a stable single-frequency state at the threshold to multifrequency spectra in the overdriven state. Simulation and experimental results on amplifier characterization and dynamics of the regenerative TWT oscillator include spectral evolution and phase stability of the generated frequencies. The results of the experiment are in good agreement with the simulations.

A high-throughput x-ray microtomography system at the Advanced Photon Source

~Received 14 November 2000; accepted for publication 23 January 2001!A third-generation synchrotron radiation source provides enough brilliance to acquire completetomographic data sets at 100 nm or better resolution in a few minutes. To take advantage of suchhigh-brilliance sources at the Advanced Photon Source, we have constructed a pipelined dataacquisition and reconstruction system that combines a fast detector system, high-speed datanetworks, and massively parallel computers to rapidly acquire the projection data and perform thereconstruction and rendering calculations. With the current setup, a data set can be obtained andreconstructed in tens of minutes. A specialized visualization computer makes renderedthree-dimensional~3D! images available to the beamline users minutes after the data acquisition iscompleted. This system is capable of examining a large number of samples at sub-mm 3D resolutionor studying the full 3D structure of a dynamically evolving sample on a 10 min temporal scale. Inthe near future, we expect to increase the spatial resolution to below 100 nm by using zone-platex-ray focusing optics and to improve the time resolution by the use of a broadband x-raymonochromator and a faster detector system.

Fracture strength of ultrananocrystalline diamond thin films—identification of Weibull parameters

The fracture strength of ultrananocrystalline diamond (UNCD) has been investigated using tensile testing of freestanding submicron films. Specifically, the fracture strength of UNCD membranes, grown by microwave plasma chemical vapor deposition (MPCVD), was measured using the membrane deflection experiment developed by Espinosa and co-workers. The data show that fracture strength follows a Weibull distribution. Furthermore, we show that the Weibull parameters are highly dependent on the seeding process used in the growth of the films. When seeding was performed with microsized diamond particles, using mechanical polishing, the stress resulting in a probability of failure of 63% was found to be 1.74 GPa, and the Weibull modulus was 5.74. By contrast, when seeding was performed with nanosized diamond particles, using ultrasonic agitation, the stress resulting in a probability of failure of 63%, increased to 4.13 GPa, and the Weibull modulus was 10.76. The tests also provided the elastic modulus of UNCD, whi...

Role of solvation dynamics and local ordering of water in inducing conformational transitions in poly(N-isopropylacrylamide) oligomers through the LCST.

Conformational transitions in thermo-sensitive polymers are critical in determining their functional properties. The atomistic origin of polymer collapse at the lower critical solution temperature (LCST) remains a fundamental and challenging problem in polymer science. Here, molecular dynamics simulations are used to establish the role of solvation dynamics and local ordering of water in inducing conformational transitions in isotactic-rich poly(N-isopropylacrylamide) (PNIPAM) oligomers when the temperature is changed through the LCST. Simulated atomic trajectories are used to identify stable conformations of the water-molecule network in the vicinity of polymer segments, as a function of the polymer chain length. The dynamics of the conformational evolution of the polymer chain within its surrounding water molecules is evaluated using various structural and dynamical correlation functions. Around the polymer, water forms cage-like structures with hydrogen bonds. Such structures form at temperatures both below and above the LCST. The structures formed at temperatures above LCST, however, are significantly different from those formed below LCST. Short oligomers consisting of 3, 5, and 10 monomer units (3-, 5-, and 10-mer), are characterized by significantly higher hydration level (water per monomer ~ 16). Increasing the temperature from 278 to 310 K does not perturb the structure of water around the short oligomers. In the case of 3-, 5-, and 10-mer, a distinct coil-to-globule transition was not observed when the temperature was raised from 278 to 310 K. For a PNIPAM polymer chain consisting of 30 monomeric units (30-mer), however, there exist significantly different conformations corresponding to two distinct temperature regimes. Below LCST, the water molecules in the first hydration layer (~12) around hydrophilic groups arrange themselves in a specific ordered manner by forming a hydrogen-bonded network with the polymer, resulting in a solvated polymer acting as hydrophilic. Above LCST, this arrangement of water is no longer stable, and the hydrophobic interactions become dominant, which contributes to the collapse of the polymer. Thus, this study provides atomic-scale insights into the role of solvation dynamics in inducing coil-to-globule phase transitions through the LCST for thermo-sensitive polymers like PNIPAM.

Mechanical properties of ultrananocrystalline diamond thin films relevant to MEMS/NEMS devices

The mechanical properties of ultrananocrystalline diamond (UNCD) thin films were measured using microcantilever deflection and membrane deflection techniques. Bending tests on several free-standing UNCD cantilevers, 0.5 μm thick, 20 μm wide and 80 μm long, yielded elastic modulus values of 916–959 GPa. The tests showed good reproducibility by repeated testing on the same cantilever and by testing several cantilevers of different lengths. The largest source of error in the method was accurate measurement of film thickness. Elastic modulus measurements performed with the novel membrane deflection experiment (MDE), developed by Espinosa and co-workers, gave results similar to those from the microcantilever-based tests. Tests were performed on UNCD specimens grown by both micro and nano wafer-seeding techniques. The elastic modulus was measured to be between 930–970 GPa for the microseeding and between 945–963 GPa for the nanoseeding technique. The MDE test also provided the fracture strength, which for UNCD was found to vary from 0.89 to 2.42 GPa for the microseeded samples and from 3.95 to 5.03 for the nanoseeded samples. The narrowing of the elastic modulus variation and major increase in fracture strength is believed to result from a reduction in surface roughness, less stress concentration, when employing the nanoseeding technique. Although both methods yielded reliable values of elastic modulus, the MDE was found to be more versatile since it yielded additional information about the structure and material properties, such as strength and initial stress state.

Spatial coherence measurement of X-ray undulator radiation

We measure the spatial coherence function of a quasi-monochromatic 1.1 keV X-ray beam from an undulator at a third-generation synchrotron. We use a Youngs slit apparatus to measure the coherence function and find that the coherence measured is poorer than expected. We show that this difference may be attributed to the effects of speckle due to the beamline optics. The conditions for successful coherence transport are considered.

Elasticity, strength, and toughness of single crystal silicon carbide, ultrananocrystalline diamond, and hydrogen-free tetrahedral amorphous carbon

In this work, the authors report the mechanical properties of three emerging materials in thin film form: single crystal silicon carbide (3C-SiC), ultrananocrystalline diamond, and hydrogen-free tetrahedral amorphous carbon. The materials are being employed in micro- and nanoelectromechanical systems. Several reports addressed some of the mechanical properties of these materials but they are based in different experimental approaches. Here, they use a single testing method, the membrane deflection experiment, to compare these materials’ Young’s moduli, characteristic strengths, fracture toughnesses, and theoretical strengths. Furthermore, they analyze the applicability of Weibull theory [Proc. Royal Swedish Inst. Eng. Res. 153, 1 (1939); ASME J. Appl. Mech. 18, 293 (1951)] in the prediction of these materials’ failure and document the volume- or surface-initiated failure modes by fractographic analysis. The findings are of particular relevance to the selection of micro- and nanoelectromechanical systems m...

Direct-write e-beam patterning of stimuli-responsive hydrogel nanostructures

The need for stimuli-responsive components in microfluidic systems has led to the development of hydrogel-based patterned microstructures. The most commonly practiced means for fabricating micropatterned hydrogels is based on in situ photopolymerization using 365nm UV light in a liquid medium. This approach has been found to be very successful for patterning hydrogel-based features with tens or hundreds of microns resolution, but its main drawback lies in having to contain the liquid prepolymer mixture within the device for irradiation. We instead propose an alternate approach that uses direct-write electron-beam radiation to cross-link a dry, spin-coated thin film of linear polymer. After exposure, the linear polymer is dissolved in water leaving behind the cross-linked regions. When immersed in water, the cross-linked regions assume the properties of hydrogel and undergo naturally thermoreversible swelling and shrinking. This direct-writing approach can be used to fabricate hydrogel-based nanostructures...

Tapered LIGA HARMs

The standard LIGA process takes advantage of the use of x-ray lithography to produce mold inserts with nearly vertical sidewall; the typical slope of patterns produced by x-ray lithography of polymethylmethacrylate is 0.1%. This lack of significant taper (draft angle) greatly increases the difficulty associated with ejecting parts during demolding. In this paper, a procedure is described to fabricate a mold insert with tapered features having a height of approximately 1 mm and lateral dimensions of approximately 300 μm. A set of six oblique exposures of a thick layer of SU-8 (an EPON epoxy based negative tone resist) is used to create hexagonal posts with a 3° draft angle. An electroforming process is used to fabricate a nickel mold insert with the tapered features. This mold insert is used to injection mold tapered polymer high aspect ratio microstructures. The dimensions of the SU-8 tapered structures (as well as the mold insert) are within 4 μm of desired/predicted values.