Devrez M. Karabacak

High-frequency nanofluidics: an experimental study using nanomechanical resonators.

Here we apply nanomechanical resonators to the study of oscillatory fluid dynamics. A high-resonance-frequency nanomechanical resonator generates a rapidly oscillating flow in a surrounding gaseous environment; the nature of the flow is studied through the flow-resonator interaction. Over the broad frequency and pressure range explored, we observe signs of a transition from Newtonian to non-Newtonian flow at omega tau approximately 1, where tau is a properly defined fluid relaxation time. The obtained experimental data appear to be in close quantitative agreement with a theory that predicts a purely elastic fluid response as omega tau --> infinity.

Diffraction effects in optical interferometric displacement detection in nanoelectromechanical systems

Optical interferometric displacement detection techniques have recently found use in the study of nanoelectromechanical systems (NEMS). Here, we study the effectiveness of these techniques as the relevant NEMS dimensions are reduced beyond the optical wavelength used. We first demonstrate that optical cavities formed in the sacrificial gaps of subwavelength NEMS enable enhanced displacement detection sensitivity. In a second set of measurements, we show that the displacement sensitivity of conventional path-stabilized Michelson interferometry degrades rapidly beyond the diffraction limit. Both experiments are consistent with numerical models.

Optical knife-edge technique for nanomechanical displacement detection

We describe an optical knife-edge technique for nanomechanical displacement detection. Here, one carefully focuses a laser spot on a moving edge and monitors the reflected power as the edge is displaced sideways. To demonstrate nanomechanical displacement detection using the knife-edge technique, we have measured in-plane resonances of nanometer scale doubly clamped beams. The obtained displacement sensitivity is in the ∼1pm∕Hz range—in close agreement with a simple analytical model.

Analysis of optical interferometric displacement detection in nanoelectromechanical systems

Optical interferometry has found recent use in the detection of nanometer scale displacements of nanoelectromechanical systems (NEMS). At the reduced length scale of NEMS, these measurements are strongly affected by the diffraction of light. Here, we present a rigorous numerical model of optical interferometric displacement detection in NEMS. Our model combines finite element methods with Fourier optics to determine the electromagnetic field in the near-field region of the NEMS and to propagate this field to a detector in the far field. The noise analysis based upon this model allows us to elucidate the displacement sensitivity limits of optical interferometry as a function of device dimensions as well as important optical parameters. Our results may provide benefits for the design of next generation, improved optical NEMS.

Nanomechanical displacement detection using fiber-optic interferometry

We describe a fiber-optic interferometer to detect the motion of nanomechanical resonators. In this system, the primary technical challenge of aligning the fiber-optic probe to nanometer-scale resonators is overcome by simply monitoring the scattered light from the devices. The system includes no free-space optical components, and is thus simple, stable, and compact with an estimated displacement sensitivity of ∼0.3pm∕Hz at optical power levels of ∼0.75mW.

Universality in oscillating flows.

We show that oscillating flow of a simple fluid in both the Newtonian and the non-Newtonian regime can be described by a universal function of a single dimensionless scaling parameter omega tau, where omega is the oscillation (angular) frequency and tau is the fluid relaxation time; geometry and linear dimension bear no effect on the flow. Energy dissipation of mechanical resonators in a rarefied gas follows this universality closely in a broad linear dimension (10(-6) m < L < 10(-2) m) and frequency (10(5) Hz < omega/2pi < 10(8) Hz) range. Our results suggest a deep connection between flows of simple and complex fluids.

Power-efficient readout circuit for miniaturized electronic nose

A hybrid combination of piezoelectric MEMS resonators and CMOS oscillator readout circuit forms the necessary ingredients of a new generation of electronic nose (e-nose) devices that, owing to their form factor and power consumption, enable a range of novel applications. This paper presents a hybrid low-power, high-resolution e nose system, including the necessary digital interface. An integrated readout was designed for the tracking of resonant frequency shift due to a change in the VOC environment concentration. It interfaces a piezo-actuated functionalized doubly clamped beam resonator that combines low actuation power (μW), high VOC sensitivity but low quality factor in air, large parasitic capacitance and multiple resonance modes. The sensor characteristics translate into a challenging readout design, as high gain-bandwidth product versus low power and low noise are required for optimal detection resolution.

Lattice Boltzmann simulation of electromechanical resonators in gaseous media

In this work, we employ a kinetic-theory-based approach to predict the hydrodynamic forces on electromechanical resonators operating in gaseous media. Using the Boltzmann–BGK equation, we investigate the influence of the resonator geometry on the fluid resistance in the entire range of non-dimensional frequency variation 0 ≤ τω ≤ ∞; here the fluid relaxation time τ = μ/ p is determined by the gas viscosity μ and pressure p at thermodynamic equilibrium, and ω is the (angular) oscillation frequency. Our results here capture two important aspects of recent experimental measurements that covered a broad range of experimental parameters. First, the experimentally observed transition from viscous to viscoelastic flow in simple gases at τω ≈ 1 emerges naturally in the numerical data. Second, the calculated effects of resonator geometry are in agreement with experimental observations.

Power-Efficient Oscillator-Based Readout Circuit for Multichannel Resonant Volatile Sensors

This work presents a multichannel electronic nose system that enables a range of novel applications owing to high sensitivity, low form factor and low power consumption. Each channel is based on a combination of doubly-clamped piezoelectric MEMS resonators and CMOS oscillator-based readout designed in TSMC 0.25 μm technology. Using “application specific” polymer coatings, the individual resonators can be tuned to detect mixtures of volatile organic compounds (VOCs). This system achieves ppm-level theoretical limit of detection for ethanol which paves the way towards a broad range of applications such as personalized health and environment air quality.

Diffraction of evanescent waves and nanomechanical displacement detection

Sensitive displacement detection has emerged as a significant technological challenge in mechanical resonators with nanometer-scale dimensions. A novel nanomechanical displacement detection scheme based upon the scattering of focused evanescent fields is proposed. The sensitivity of the proposed approach is studied using diffraction theory of evanescent waves. Diffraction theory results are compared with numerical simulations.