Ding Xuran

Failure of a MEMS switch after environmental test

A MEMS switch based on electro-thermal and electro-explosion has been packaged before its humidity test, temperature shock test and ballistic shock test are taken. Some devices failed after the tests. The analysis of such a device is given in this paper.

A multi-channel test system for calibration of MEMS barometric pressure sensors

For the advantages of small volume, low power consumption and high accuracy, MEMS sensors have been widely used in many fields, especially for high altitude meteorology monitoring, where a radiosonde with MEMS barometric pressure sensors will be used to collect the data of barometric pressure. Therefore, the way to calibrate such MEMS sensors effectively is of a great value. This paper reported a method for calibration of multiple state of the art MEMS barometric pressure sensors simultaneously based on an innovative test system. With this system, at most eight sensors can be calibrated in a same time. A test for this system by utilizing BMP085 has been implemented, and the results showed that the system was reliable and effective.