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Ding Yi

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Publication

Featured researches published by Ding Yi.

Archive | 2015

Grinding head washing device, grinding equipment and washing method

Ding Yi; Zhu Yefang

Archive | 2014

Wafer recycling method

Ding Yi; Zhu Yefang

Archive | 2014

Grinding speed detection apparatus, grinding device and method for detecting grinding speed in real time

Yan Junhua; Zhu Yefang; Wang Conggang; Ding Yi

Archive | 2014

System for preventing wafer from being scratched by grinding mat

Ding Yi; Zhu Yefang; Yan Junhua

Archive | 2013

Method for manufacturing high-K metal gate in fin-shaped active area

Zhang Minghua; Fang Jingxun; Yan Junhua; Ding Yi

Archive | 2016

Chemical mechanical grinding device and chemical mechanical grinding method thereof

Yan Junhua; Zhu Yefang; Ding Yi

Archive | 2015

Retaining ring steel ring device for chemical machinery grinding equipment

Ding Yi; Zhu Yefang

Archive | 2015

Chemical mechanical grinding liquid supply device

Ding Yi; Zhu Yefang

Archive | 2015

Method for testing film grinding speed

Wang Conggang; Zhu Yefang; Yan Junhua; Ding Yi

Archive | 2015

Defect detection method for membrane of grinding head

Ding Yi; Zhu Yefang

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Collaboration

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