Ding Yi

Grinding head washing device, grinding equipment and washing method

Wafer recycling method

Grinding speed detection apparatus, grinding device and method for detecting grinding speed in real time

System for preventing wafer from being scratched by grinding mat

Method for manufacturing high-K metal gate in fin-shaped active area

Chemical mechanical grinding device and chemical mechanical grinding method thereof

Retaining ring steel ring device for chemical machinery grinding equipment

Chemical mechanical grinding liquid supply device

Method for testing film grinding speed

Defect detection method for membrane of grinding head