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Dong Sun Sheen

SK Hynix

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Publication

Featured researches published by Dong Sun Sheen.

non volatile memory technology symposium | 2014

Grain size monitoring of 3D flash memory channel poly-Si using multiwavelength Raman spectroscopy

Woo Sik Yoo; Toshikazu Ishigaki; Takeshi Ueda; Kitaek Kang; Noh Yeal Kwak; Dong Sun Sheen; Sung Soon Kim; Min Sung Ko; Wan Sup Shin; Byung Seok Lee; Seung Jin Yeom; Sung Ki Park

Raman spectroscopy was used for characterizing poly-Si after thermal annealing of chemical vapor deposited (CVD) thin a-Si films in the vertical channel region of 3D V-NAND device wafers using various annealing conditions and techniques. Raman spectra, indicating crystallization of a-Si films and grain growth of poly-Si with respect to annealing conditions and techniques, was measured using a multiwavelength Raman spectroscopy system.

Archive | 2007

Semiconductor device having reduced standby leakage current and increased driving current and method for manufacturing the same

Dong Sun Sheen; Sang Tae Ahn; Seok Pyo Song; Hyeon Ju An

Archive | 2008

Method of fabricating a non-volatile memory device

Seok Pyo Song; Dong Sun Sheen; Young Jin Lee; Mi Ri Lee; Chi Ho Kim; Gil Jae Park; Bo Min Seo

Archive | 2006

Method of forming fin transistor

Dong Sun Sheen; Seok Pyo Song; Sang Tae Ahn; Hyun Chul Sohn

Archive | 2006

Method of forming isolation structure of semiconductor device for preventing excessive loss during recess gate formation

Dong Sun Sheen; Seok Pyo Song; Sang Tae Ahn; Hyeon Ju An

Archive | 2008

Method for Forming Gate of Non-Volatile Memory Device

Seok Pyo Song; Dong Sun Sheen; Seung Ho Pyi; Ki Seon Park; Sun Hwan Hwang; Mi Ri Lee; Gil Jae Park

Archive | 2014

3-DIMENSIONAL NONVOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME

Min-Soo Kim; Dong Sun Sheen; Young Jin Lee; Jin Hae Choi; Joo Hee Han; Sung Jin Whang

225th ECS Meeting (May 11-15, 2014) | 2014

Raman Characterization of Poly-Si Channel Materials for 3D Flash Memory Device Applications

Woo Sik Yoo; Toshikazu Ishigaki; Takeshi Ueda; Kitaek Kang; Dong Sun Sheen; Sung Soon Kim; Min Sung Ko; Wan Sup Shin; Noh Yeal Kwak; Byung Seok Lee

Archive | 2007

METHOD FOR MANUFACTURING FIN TRANSISTOR THAT PREVENTS ETCHING LOSS OF A SPIN-ON-GLASS INSULATION LAYER

Dong Sun Sheen; Seok Pyo Song; Young Ho Lee

Archive | 2008

Method of Manufacturing Semiconductor Device using Salicide Process

Young Jin Lee; Dong Sun Sheen; Seok Pyo Song; Mi Ri Lee; Chi Ho Kim; Gil Jae Park; Bo Min Seo

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Seok Pyo Song

SK Hynix

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Sang Tae Ahn

SK Hynix

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Gil Jae Park

SK Hynix

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Hyeon Ju An

SK Hynix

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Mi Ri Lee

SK Hynix

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Young Jin Lee

SK Hynix

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Takeshi Ueda

Kyoto University

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Woo Sik Yoo

Tokyo Electron

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Bo Min Seo

SK Hynix

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Byung Seok Lee

SK Hynix

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