Dongming Sun

A piezoelectric linear ultrasonic motor with the structure of a circular cylindrical stator and slider

A piezoelectric linear ultrasonic motor is proposed, with a cylindrical stator and slider structure. The length and diameter of the motor are about 10 and 1.5 mm, respectively. The stator consists of two piezoelectric ceramic (PZT) tubes connected by a thin film metallic glass (TFMG) pipe. The stator is designed based on theoretical analyses and finite element method (FEM) simulation. The traveling wave propagation is obtained in the FEM simulation under the proper geometrical sizes, suitable boundary conditions and driving voltage signals. The trajectories of particles on the TFMG pipe are elliptical motion. In the experiment, a 25 µm thick TFMG pipe is fabricated using the rotating magnetron sputtering technique and the vibration characteristics of the stator are measured by a laser Doppler vibrometer (LDV) system. Bidirectional motion of the slider is observed around 600 kHz, the maximum velocity is near to 40 mm s − 1 at 50 Vp–p for the loose slider and the maximum output force is 6 mN at 70 Vp–p for the tight slider.

Vibration characteristics of a cylindrical shell with 25 μm thickness fabricated by the rotating sputtering system

A thin film rotating sputtering system is presented for fabrication of a circular cylindrical shell (CCS). The length, diameter, and thickness of the CCS are 5.0 mm, 1.5 mm, and 25 mum, respectively. To investigate the vibration characteristics, the CCS is fabricated on the outer surface of a piezoelectric ceramic tube (PCT). The vibration of PCT excited by driving voltage signals causes the vibration of the CCS, and the vibration characteristics can be measured using a laser Doppler vibrometer system. Furthermore, a finite element method (FEM) simulation and 2 analytical calculation methods are proposed for comparison with the measurement results. The frequency factor, the key factor that dominates the effective ranges of the 2 analytical methods, is determined as a value of 0.92 through a series of discussions. Combining the results of the 2 analytical calculation methods, good agreement of the analytical, FEM, and measurement results is obtained.

Axial vibration characteristics of a cylindrical, radially polarized piezoelectric transducer with different electrode patterns

A circular cylindrical piezoelectric transducer with radial polarization is proposed. The axial vibration characteristics of the transducer are studied by three different methods: analytical calculation, FEM simulation and experiment. The symmetric and asymmetric excitation conditions are discussed in the Haskins and Walsh model. For the resonance frequencies of the transducer, the results from the above three methods coincide well with each other. For the vibration amplitude, there are some deviations between the FEM simulation and measurement results; some possible reasons for this are discussed. The influence of the electrode patterns on the excitation modes are also investigated in detail. Based on the study described in this paper, the research methodology for a cylindrical piezoelectric transducer is clarified.

Theoretical and experimental investigation of traveling wave propagation on a several- millimeter-long cylindrical pipe driven by piezoelectric ceramic tubes

A novel method is presented for investigation of the traveling wave propagation generated on a thin film pipe with a short length of several millimeters. As a bridge to connect two piezoelectric ceramic (lead zirconate titanate, PZT) tubes, a thin-film metallic glass (TFMG) pipe is fabricated by a new technique of rotating magnetron sputtering. The vibrator combines the vibration of the axial mode of the PZT tube and the radial mode of the TFMG pipe. Theoretical analyses of the TFMG pipe and PZT tube, with a comparison of the finite element modeling, clarify the vibration characteristics so that the proper geometrical sizes, suitable boundary conditions, and driving voltage signals are designed. In the experiment, the designed vibrator was fabricated and the vibration characteristics were measured by a laser Doppler vibrometer system. The pure traveling wave propagation obtained theoretically and experimentally demonstrates the validity of this work. This study shows a new way to achieve a pure traveling wave on a short cylindrical pipe driven by PZT tubes.

A Traveling Wave Type of Piezoelectric Ultrasonic Bidirectional Linear Microactuator

A piezoelectric ultrasonic microactuator is presented, with a cylindrical stator and slider structure. The length and diameter of the microactuator are about 10 and 1.5 mm, respectively. The stator consists of two piezoelectric ceramic (PZT) tubes connected by a thin film metallic glass (TFMG) pipe, which is fabricated using the rotating magnetron sputtering technique. Traveling wave propagation is generated on the TFMG pipe in finite element method (FEM) simulations and also observed in the measurement. Bi-directional motion of the slider was observed around 600 kHz, and the maximum velocity was about 40 mm/s at 25 V.

Driving mechanism, design, fabrication process, and experiments of a cylindrical ultrasonic linear microactuator

A new type of cylindrical ultrasonic linear microactuator (CULMA) is introduced. The traveling wave generation condition in the stator is presented, which was confirmed using simulation and experimentation. The design and fabrication process to develop the stator is described. The stator was successfully fabricated using metallic glass and a sputtering method, and the vibration of the prototype matched the simulation results. When the driving frequency is at 626 kHz, the traveling wave in the stator was observed. Loaded with a pipe slider, the slider movement was experimentally demonstrated and the motion measured with 26 mm/s in peak speed. This paper presents a traveling wave generation method in a CULMA which would also available in other microactuators or MEMS-scale ones.