Douglas A. Webb

Micro-mechanical device with non-evaporable getter

Deposition of silicon-containing films using organosilicon compounds and nitrogen trifluoride

Self-assembled monolayer coating for micro-mechanical devices

Method for fabricating a DMD spatial light modulator with a hardened hinge

PFPE coatings for micro-mechanical devices

Polymeric coatings for micromechanical devices

Method and apparatus for etching semiconductor materials

Non-linear hinge for micro-mechanical device

Phase matched reset for digital micro-mirror device

SELECTIVE DIELECTRIC DEPOSITION ON HORIZONTAL FEATURES OF AN INTEGRATED CIRCUIT SUBASSEMBLY