Publication


Featured researches published by Dustin W. Ho.


Archive | 2005

Tandem uv chamber for curing dielectric materials

Thomas Nowak; Juan Carlos Rocha-Alvarez; Andrzej Kaszuba; Scott A. Hendrickson; Dustin W. Ho; Sanjeev Baluja; Tom K. Cho; Josephine J. Chang; Hichem M'Saad


Archive | 2007

Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors

Juan Carlos Rocha-Alvarez; Thomas Nowak; Dale R. Du Bois; Sanjeev Baluja; Scott A. Hendrickson; Dustin W. Ho; Andrzei Kaszuba; Tom K. Cho


Archive | 2006

High efficiency UV curing system

Thomas Nowak; Juan Carlos Rocha-Alvarez; Andrzej Kaszuba; Scott A. Hendrickson; Dustin W. Ho; Sanjeev Baluja; Tom K. Cho; Josephine J. Chang; Hichem M'Saad


Archive | 2007

Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation

Juan Carlos Rocha-Alvarez; Thomas Nowak; Dale R. Du Bois; Sanjeev Baluja; Scott A. Hendrickson; Dustin W. Ho; Andrzei Kaszuba; Tom K. Cho


Archive | 2005

Multi-stage curing of low k nano-porous films

Francimar Schmitt; Yi Zheng; Kang Sub Yim; Sang H. Ahn; Lester A. D'Cruz; Dustin W. Ho; Alexandros T. Demos; Li-Qun Xia; Hichem M'Saad


Archive | 2007

Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors

Andrzei Kaszuba; Juan Carlos Rocha-Alvarez; Sanjeev Baluja; Tom K. Cho; Hichem M'Saad; Scott A. Hendrickson; Dustin W. Ho; Thomas Nowak


Archive | 2011

Ultraviolet reflector with coolant gas holes and method

Yao-Hung Yang; Tuan Anh Nguyen; Sanjeev Baluja; Andrzej Kaszuba; Juan Carlos Rocha; Thomas Nowak; Dustin W. Ho


Archive | 2006

Nitrogen enriched cooling air module for uv curing system

Dustin W. Ho; Juan Carlos Rocha-Alvarez; Dale R. Du Bois; Scott A. Hendrickson; Sanjeev Baluja; Ndanka O. Mukuti


Archive | 2009

Method and apparatus for uv curing with water vapor

Dustin W. Ho; Scott A. Hendrickson; Juan Carlos Rocha-Alvarez; Sanjeev Baluja; Thomas Nowak


Archive | 2005

Formation of low K material utilizing process having readily cleaned by-products

Dustin W. Ho; Helen R. Armer; Hichem M'Saad

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