E. I. Rau

Quantitative morphological analysis in a SEM-microcomputer system—II. Morphological analysis of complex SEM images

The application of automatic image analysis image techniques in the SEM to massive samples with complex morphology requires a careful choice of the imaging mode and detector geometry used. Thus the quantitative analysis of conjugated surfaces requires summary images, derived from backscattered, secondary, transmitted electron and cathodo‐luminescent signals, as well as dedicated processing algorithms. Careful attention must also be paid to the problems of obtaining and matching these various images.