E. Wagenaars

Two-photon absorption laser-induced fluorescence measurements of atomic nitrogen in a radio-frequency atmospheric-pressure plasma jet

The first direct measurements of atomic nitrogen species in a radio-frequency atmospheric-pressure plasma jet (APPJ) are presented. Atomic nitrogen radicals play a key role in new plasma medicine applications of APPJs. The measurements were performed with a two-photon absorption laser-induced fluorescence diagnostic, using 206.65 nm laser photons for the excitation of ground-state N atoms and observing fluorescence light around 744 nm. The APPJ was run with a helium gas flow of 1 slm and varying small admixtures of molecular nitrogen of 0–0.7 vol%. A maximum in the measured N concentration was observed for an admixture of 0.25 vol% N2.

Exotic dense-matter states pumped by a relativistic laser plasma in the radiation-dominated regime

In high-spectral resolution experiments with the petawatt Vulcan laser, strong x-ray radiation of KK hollow atoms (atoms without n = 1 electrons) from thin Al foils was observed at pulse intensities of 3 × 10(20) W/cm(2). The observations of spectra from these exotic states of matter are supported by detailed kinetics calculations, and are consistent with a picture in which an intense polychromatic x-ray field, formed from Thomson scattering and bremsstrahlung in the electrostatic fields at the target surface, drives the KK hollow atom production. We estimate that this x-ray field has an intensity of >5 × 10(18) W/cm(2) and is in the 3 keV range.

Experimental and modelling investigations of a dielectric barrier discharge in low-pressure argon

The discharge behaviour of a dielectric barrier discharge (DBD) in low-pressure argon gas was investigated by experiments and modelling. The electrical characteristics and light emission dynamics of the discharge were measured and compared with the results of a two-dimensional fluid model. Our investigations showed that the discharge consisted of a single, diffuse discharge per voltage half-cycle. The breakdown phase of the low-pressure DBD (LPDBD) was investigated to be similar to the ignition phase of a low-pressure glow discharge without dielectrics, described by Townsend breakdown theory. The stable discharge phase of the LPDBD also showed a plasma structure with features similar to those of a classical glow discharge. The presence of the dielectric in the discharge gap led to the discharge quenching and thus the decay of the plasma. Additionally, the argon metastable density was monitored by measuring light emission from nitrogen impurities. A metastable density of about 5 ? 1017?m?3 was present during the entire voltage cycle, with only a small (~10%) increase during the discharge. Finally, a reduction of the applied voltage to the minimum required to sustain the discharge led to a further reduction of the role of the dielectric. The discharge was no longer quenched by the dielectrics only but also by a reduction of the applied voltage.

Measurement and control of the streamer head electric field in an atmospheric-pressure dielectric barrier plasma jet

The propagation dynamics of an atmospheric-pressure plasma jet resemble that of a cathode-directed streamer and are determined, in part, by the high localized electric field at the streamer head. This contribution employs an optical spectroscopy technique based on the polarization-dependent Stark splitting and shifting of visible helium lines to non-invasively measure the streamer head electric field. It is demonstrated that the streamer head is comprised of a high-field region with a peak magnitude of ~24 kV cm−1, which is followed by a low-field region, ~9 kV cm−1, identified as the streamer tail. The application of varying polarity voltage pulses to supplementary electrodes situated along the axis of streamer propagation is shown to influence the streamer head electric field and affords a level of control over the propagation dynamics of the plasma jet, a finding that has considerable application potential.

Detailed analysis of hollow ions spectra from dense matter pumped by X-ray emission of relativistic laser plasma

X-ray emission from hollow ions offers new diagnostic opportunities for dense, strongly coupled plasma. We present extended modeling of the x-ray emission spectrum reported by Colgan et al. [Phys. Rev. Lett. 110, 125001 (2013)] based on two collisional-radiative codes: the hybrid-structure Spectroscopic Collisional-Radiative Atomic Model (SCRAM) and the mixed-unresolved transition arrays (MUTA) ATOMIC model. We show that both accuracy and completeness in the modeled energy level structure are critical for reliable diagnostics, investigate how emission changes with different treatments of ionization potential depression, and discuss two approaches to handling the extensive structure required for hollow-ion models with many multiply excited configurations.

Sn DPP source-collector modules: status of alpha resources, beta developments, and the scalability to HVM

For industrial EUV (extreme ultra-violet) lithography applications high power extreme ultraviolet (EUV) light sources are needed at a central wavelength of 13.5 nm, targeting 32 nm node and below. Philips Extreme UV GmbH and XTREME technologies GmbH have developed DPP (Discharge Produced Plasma) Alpha tools which run in operation at several locations in the world. In this paper the status of the Alpha Sn-DPP tools as developed by Philips Extreme UV GmbH will be given. The Alpha DPP tools provide a good basis for the development and engineering of the Beta tools and in the future of the HVM tools. The first Beta source has been designed and first light has been produced. Engineering steps will folow to optimize this first generation Beta Sn-DPP source. HVM tools target EUV power levels from 200W to 500W in IF. In this paper we show that the power requried for HVM can be generated with Sn-DPP sources. Based on Alpha Sn-DPP sources we show that repetition frequency and generated EUV pulse energy is scalable up to power levels that match the HVM requirements.

Plasma emission imaging of a low-pressure argon breakdown

Breakdown in a low-pressure argon discharge was investigated experimentally by time-resolved plasma emission imaging with an intensified charge coupled device camera. Basic features of plasma breakdown, such as light emission in front of the anode and crossing of an emission front from anode to cathode, were observed. The observations were in agreement with the standard Townsend theory on breakdown into a glow discharge. In addition, a pre-breakdown light flash was observed. This light flash, which occurred at a voltage below the static breakdown voltage, was thought to originate from charges from previous discharges deposited on dielectric surfaces close to the discharge gap. Finally, the time delay as a function of the afterglow period of the discharge was measured. The densities of charged particles at the time of ignition influenced the measured time delay. For afterglow periods increasing from 1 to 20 ms, volume recombination of charged particles caused a sharp increase in the time delay from 1 to 9 µs. For longer afterglow periods (20–200 ms), diffusion became increasingly important and caused a slower increase in time delay (9–11 µs).

Hot electron production in laser solid interactions with a controlled pre-pulse

Hot electron generation plays an important role in the fast ignition approach to inertial confinement fusion (ICF) and other applications with ultra-intense lasers. Hot electrons of temperature up to 10–20 MeV have been produced by high contrast picosecond duration laser pulses focussed to intensities of ∼1020 W cm−2 with a deliberate pre-pulse on solid targets using the Vulcan Petawatt Laser facility. We present measurements of the number and temperature of hot electrons obtained using an electron spectrometer. The results are correlated to the density scale length of the plasma produced by a controlled pre-pulse measured using an optical probe diagnostic. 1D simulations predict electron temperature variations with plasma density scale length in agreement with the experiment at shorter plasma scale lengths (<7.5μm), but with the experimental temperatures (13–17 MeV) dropping below the simulation values (20–25 MeV) at longer scale lengths. The experimental results show that longer interaction plasmas prod...

Power scaling of an extreme ultraviolet light source for future lithography

For future lithography applications, high-power extreme ultraviolet (EUV) light sources are needed at a central wavelength of 13.5nm within 2% bandwidth. We have demonstrated that from a physics point of view the Philips alpha-prototype source concept is scalable up to the power levels required for high-volume manufacturing (HVM) purposes. Scalability is shown both in frequency, up to 100kHz, and pulse energy, up to 55mJ collectable EUV per pulse, which allows us to find an optimal working point for future HVM sources within a wide parameter space.

Mechanisms behind surface modification of polypropylene film using an atmospheric-pressure plasma jet

Plasma treatments are common for increasing the surface energy of plastics, such as polypropylene (PP), to create improved adhesive properties. Despite the significant differences in plasma sources and plasma properties used, similar effects on the plastic film can be achieved, suggesting a common dominant plasma constituent and underpinning mechanism. However, many details of this process are still unknown. Here we present a study into the mechanisms underpinning surface energy increase of PP using atmospheric-pressure plasmas. For this we use the effluent of an atmospheric-pressure plasma jet (APPJ) since, unlike most plasma sources used for these treatments, there is no direct contact between the plasma and the PP surface; the APPJ provides a neutral, radical-rich environment without charged particles and electric fields impinging on the PP surface. The APPJ is a RF-driven plasma operating in helium gas with small admixtures of O2 (0–1%), where the effluent propagates through open air towards the PP surface. Despite the lack of charged particles and electric fields on the PP surface, measurements of contact angle show a decrease from 93.9° to 70.1° in 1.4 s and to 35° in 120 s, corresponding to a rapid increase in surface energy from 36.4 mN m−1 to 66.5 mN m−1 in the short time of 1.4 s. These treatment effects are very similar to what is found in other devices, highlighting the importance of neutral radicals produced by the plasma. Furthermore, we find an optimum percentage of oxygen of 0.5% within the helium input gas, and a decrease of the treatment effect with distance between the APPJ and the PP surface. These observed effects are linked to two-photon absorption laser-induced fluorescence spectroscopy (TALIF) measurements of atomic oxygen density within the APPJ effluent which show similar trends, implying the importance of this radical in the surface treatment of PP. Analysis of the surface reveals a two stage mechanism for the production of polar bonds on the surface of the polymer: a fast reaction producing carboxylic acid, or a similar ketone, followed by a slower reaction that includes nitrogen from the atmosphere on the surface, producing amides from the ketones.