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Eckhard Marx

Infineon Technologies

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Publication

Featured researches published by Eckhard Marx.

Archive | 2003

Configuration and method for detecting defects on a substrate in a processing tool

Torsten Seidel; Ralf Otto; Karl Schumacher; Thorsten Schedel; Eckhard Marx; Günter Hraschan

Archive | 2004

Semiconductor device identification apparatus

Eckhard Marx; Martin Peiter

Archive | 2003

Detecting environmental or process parameters in process-wafer manufacturing environment for semiconductor integrated circuit manufacture, by exposing wafer comprising sensors to manufacturing environment

Christoph Hocke; Eckhard Marx

Archive | 2002

Self-supporting adaptable metrology device

Volker Tegeder; Detlef Gerhard; Johannes Lechner; Eckhard Marx

Archive | 2003

Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locations

Michael Abraham; Eckhard Marx

Archive | 2001

Wafer scribing method and wafer scribing device

Martin Peiter; Eckhard Marx; Karl Mautz

Archive | 2002

Arrangement and method for detecting defects on a substrate in a processing tool

Guenther Hraschan; Eckhard Marx; Ralf Otto; Thorsten Schedel; Karl Schumacher; Torsten Seidel

Archive | 2002

Apparatus and method for removing an organic material from a semiconductor device

Anne Kurtenbach; Bernd Stottko; Torsten Schneider; Eckhard Marx

Archive | 2000

Arrangement and method for removing an organic material from a semiconductor device

Anne Jakob; Eckhard Marx; Torsten Schneider; Bernd Stottko

Archive | 2002

Appareil d'identification de dispositif a semi-conducteur

Eckhard Marx; Martin Peiter

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Detlef Gerhard

Infineon Technologies

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Ralf Otto

Infineon Technologies

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Thorsten Schedel

Infineon Technologies

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Torsten Seidel

Infineon Technologies

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Jens Dipl.-Ing. Müller

Infineon Technologies

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Johannes Lechner

Siemens

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Martin Peiter

Infineon Technologies

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Bernd Stottko

Infineon Technologies

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Günther Hraschan

Infineon Technologies

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Karl Schumacher

Infineon Technologies

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