Eckhard Marx

Configuration and method for detecting defects on a substrate in a processing tool

Semiconductor device identification apparatus

Detecting environmental or process parameters in process-wafer manufacturing environment for semiconductor integrated circuit manufacture, by exposing wafer comprising sensors to manufacturing environment

Self-supporting adaptable metrology device

Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locations

Wafer scribing method and wafer scribing device

Arrangement and method for detecting defects on a substrate in a processing tool

Apparatus and method for removing an organic material from a semiconductor device

Arrangement and method for removing an organic material from a semiconductor device

Appareil d'identification de dispositif a semi-conducteur