Edmund Schüngel

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

Using a combined experimental, numerical and analytical approach, we investigate the control of plasma properties via the electrical asymmetry effect (EAE) in a capacitively coupled oxygen discharge. In particular, we present the first experimental investigation of the EAE in electronegative discharges. A dual-frequency voltage source of 13.56 MHz and 27.12 MHz is applied to the powered electrode and the discharge symmetry is controlled by adjusting the phase angle θ between the two harmonics. It is found that the bulk position and density profiles of positive ions, negative ions, and electrons have a clear dependence on θ, while the peak densities and the electronegativity stay rather constant, largely due to the fact that the time-averaged power absorption by electrons is almost independent of θ. This indicates that the ion flux towards the powered electrode remains almost constant. Meanwhile, the dc self-bias and, consequently, the sheath widths and potential profile can be effectively tuned by varying θ. This enables a flexible control of the ion bombarding energy at the electrode. Therefore, our work proves the effectiveness of the EAE to realize separate control of ion flux and ion energy in electronegative discharges. At low pressure, the strength of resonance oscillations, which are found in the current of asymmetric discharges, can be controlled with θ.

The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux

The recently theoretically predicted electrical asymmetry effect (EAE) (Heil et al 2008 IEEE Trans. Plasma Sci. 36 1404, Heil et al 2008 J. Phys. D: Appl. Phys. 41 165202, Czarnetzki et al 2009 J. Phys.: Conf. Ser. at press) in capacitively coupled radio frequency (CCRF) discharges and the related separate control of ion energy and flux via the EAE (Czarnetzki et al 2009 J. Phys.: Conf. Ser. at press, Donk´ o et al 2008 J. Phys. D: Appl. Phys. 42 025205) are tested experimentally for the first time. A geometrically symmetric CCRF discharge (equal electrode surface areas) operated at 13.56 and 27.12MHz with variable phase angle between the harmonics is operated in argon at different pressures. The dc self bias, the energy as well as the flux of ions at the grounded electrode, and the space and phase resolved optical emission are measured. The results verify the predictions of models and simulations: via the EAE a dc self bias is generated as an almost linear function of the phase. This variable dc self bias allows separate control of ion energy and flux in an almost ideal way under various discharge conditions. (Some figures in this article are in colour only in the electronic version)

The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

The electrical asymmetry effect (EAE) in geometrically symmetric capacitively coupled radio frequency discharges operated at multiple consecutive harmonics is investigated by a particle-in-cell (PIC) simulation and an analytical model. The model is based on the original EAE model, which is extended by taking into account the floating potentials, the voltage drop across the plasma bulk, and the symmetry parameter resulting from the PIC simulation. Compared with electrically asymmetric dual-frequency discharges we find that (i) a significantly stronger dc self-bias can be generated electrically and that (ii) the mean ion energies at the electrodes can be controlled separately from the ion flux over a broader range by tuning the phase shifts between the individual voltage harmonics. A recipe for the optimization of the applied voltage waveform to generate the strongest possible dc self-bias electrically and to obtain maximum control of the ion energy via the EAE is presented.

The electrical asymmetry effect in capacitively coupled radio-frequency discharges

We present an analytical model to describe capacitively coupled radio-frequency (CCRF) discharges and the electrical asymmetry effect (EAE) based on the non-linearity of the boundary sheaths. The model describes various discharge types, e.g. single and multi-frequency as well as geometrically symmetric and asymmetric discharges. It yields simple analytical expressions for important plasma parameters such as the dc self-bias, the uncompensated charge in both sheaths, the discharge current and the power dissipated to electrons. Based on the model results the EAE is understood. This effect allows control of the symmetry of CCRF discharges driven by multiple consecutive harmonics of a fundamental frequency electrically by tuning the individual phase shifts between the driving frequencies. This novel class of capacitive radio-frequency (RF) discharges has various advantages: (i) A variable dc self-bias can be generated as a function of the phase shifts between the driving frequencies. In this way, the symmetry of the sheaths in geometrically symmetric discharges can be broken and controlled for the first time. (ii) Almost ideal separate control of ion energy and flux at the electrodes can be realized in contrast to classical dual-frequency discharges driven by two substantially different frequencies. (iii) Non-linear self-excited plasma series resonance oscillations of the RF current can be switched on and off electrically even in geometrically symmetric discharges. Here, the basics of the EAE are introduced and its main applications are discussed based on experimental, simulation, and modeling results.

Secondary electrons in dual-frequency capacitive radio frequency discharges

Two fundamentally different types of dual-frequency (DF) capacitively coupled radio frequency discharges can be used for plasma processing applications to realize separate control of the ion mean energy, Ei, and the ion flux, Γi, at the substrate surface: (i) classical discharges operated at substantially different frequencies, where the low- and high-frequency voltage amplitudes, lf and hf, are used to control Ei and Γi, respectively; (ii) electrically asymmetric (EA) discharges operated at a fundamental frequency and its second harmonic with fixed, but adjustable phase shift between the driving frequencies, θ. In EA discharges the voltage amplitudes are used to control Γi and θ is used to control Ei. Here, we report our systematic simulation studies of the effect of secondary electrons on the ionization dynamics and the quality of this separate control in both discharge types in argon at different gas pressures. We focus on the effect of the control parameter for Ei on Γi for different secondary yields, γ. We find a dramatic effect of tuning lf in classical DF discharges, which is caused by a transition from α- to γ-mode induced by changing lf. In EA discharges we find that no such mode transition is induced by changing θ within the parameter range studied here and, consequently, Γi remains nearly constant as a function of θ. Thus, despite some limitations at high values of γ the quality of the separate control of ion energy and flux is generally better in EA discharges compared with classical DF discharges.

Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges

Various types of capacitively coupled radio frequency (CCRF) discharges are frequently used for different applications ranging from chip and solar cell manufacturing to the creation of biocompatible surfaces. In many of these discharges electron heating and electron dynamics are not fully understood. A powerful diagnostic to study electron dynamics in CCRF discharges is phase resolved optical emission spectroscopy (PROES). It is non-intrusive and provides access to the dynamics of highly energetic electrons, which sustain the discharge via ionization, with high spatial and temporal resolution within the RF period. Based on a time dependent model of the excitation dynamics of specifically chosen rare gas levels PROES provides access to plasma parameters such as the electron temperature, electron density and electron energy distribution function (EEDF). In this work the method of PROES is reviewed and some examples of its application are discussed. First, the generation of highly energetic electron beams by the expanding sheath in geometrically symmetric as well as asymmetric discharges and their effect on the EEDF are investigated. Second, the physical nature of the frequency coupling in dual frequency discharges operated at substantially different frequencies is discussed. Third, the generation of electric field reversals during sheath collapse in single and dual frequency discharges is analysed. Then excitation dynamics in an electrically asymmetric novel type of dual frequency discharge is studied. Finally, limitations of PROES are discussed.

Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model

An electrical asymmetry in capacitive rf discharges with a symmetrical electrode configuration can be induced by driving the discharge with a fundamental frequency and its second harmonic. For equal amplitudes of the applied voltage waveforms, it has been demonstrated by modeling, simulation, and experiments that this electrical asymmetry effect (EAE) leads to the generation of a variable dc self-bias that depends almost linearly on the phase angle between the driving voltage signals. Here, the dependence of the dc self-bias generated by the EAE on the choice of the voltage amplitudes, i.e., the ratio A of high to low frequency amplitude, is investigated experimentally as well as by using an analytical model and a particle-in-cell simulation. It is found that (i) the strongest electrical asymmetry is induced for A<1 at pressures ranging from 6 to 100 Pa and that (ii) around this optimum voltage ratio the dc self-bias normalized to the sum of both voltage amplitudes is fairly insensitive to changes of A. T...

Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

Capacitive radio frequency (RF) discharge plasmas have been serving hi-tech industry (e.g. chip and solar cell manufacturing, realization of biocompatible surfaces) for several years. Nonetheless, their complex modes of operation are not fully understood and represent topics of high interest. The understanding of these phenomena is aided by modern diagnostic techniques and computer simulations. From the industrial point of view the control of ion properties is of particular interest; possibilities of independent control of the ion flux and the ion energy have been utilized via excitation of the discharges with multiple frequencies. ‘Classical’ dual-frequency (DF) discharges (where two significantly different driving frequencies are used), as well as discharges driven by a base frequency and its higher harmonic(s) have been analyzed thoroughly. It has been recognized that the second solution results in an electrically induced asymmetry (electrical asymmetry effect), which provides the basis for the control of the mean ion energy. This paper reviews recent advances on studies of the different electron heating mechanisms, on the possibilities of the separate control of ion energy and ion flux in DF discharges, on the effects of secondary electrons, as well as on the non-linear behavior (self-generated resonant current oscillations) of capacitive RF plasmas. The work is based on a synergistic approach of theoretical modeling, experiments and kinetic simulations based on the particle-in-cell approach.

The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges

Dual-frequency capacitive discharges are used to separately control the mean ion energy, e¯ion, and flux, Γion, at the electrodes. We study the effect of secondary electrons on this separate control in argon discharges driven at 2+27 MHz at different pressures using Particle in Cell simulations. For secondary yield γ≈0, Γion decreases as a function of the low frequency voltage amplitude due to the frequency coupling, while it increases at high γ due to the effective multiplication of secondary electrons inside the sheaths. Therefore, separate control is strongly limited. e¯ion increases with γ, which might allow an in situ determination of γ-coefficients.

The effect of dust on electron heating and dc self-bias in hydrogen diluted silane discharges

In capacitive hydrogen diluted silane discharges the formation of dust affects plasma processes used, e.g. for thin film solar cell manufacturing. Thus, a basic understanding of the interaction between plasma and dust is required to optimize such processes. We investigate a highly diluted silane discharge experimentally using phase-resolved optical emission spectroscopy to study the electron dynamics, laser light scattering on the dust particles to relate the electron dynamics with the spatial distribution of dust, and current and voltage measurements to characterize the electrical symmetry of the discharge via the dc self-bias. The measurements are performed in single and dual frequency discharges. A mode transition from the α-mode to a bulk drift mode (Ω-mode) is found, if the amount of silane and, thereby, the amount of dust and negative ions is increased. By controlling the electrode temperatures, the dust can be distributed asymmetrically between the electrodes via the thermophoretic force. This affects both the electron heating and the discharge symmetry, i.e. a dc self-bias develops in a single frequency discharge. Using the Electrical Asymmetry Effect (EAE), the dc self-bias can be controlled in dual frequency discharges via the phase angle between the two applied frequencies. The Ω-mode is observed for all phase angles and is explained by a simple model of the electron power dissipation. The model shows that the mode transition is characterized by a phase shift between the applied voltage and the electron conduction current, and that the plasma density profile can be estimated using the measured phase shift. The control interval of the dc self-bias obtained using the EAE will be shifted, if an asymmetric dust distribution is present. However, the width of the interval remains unchanged, because the dust distribution is hardly affected by the phase angle.