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Dive into the research topics where Erica R. Porras is active.

Publication


Featured researches published by Erica R. Porras.


Archive | 2003

Micromachined integrated fluid delivery system with dynamic metal seat valve and other components

Mark Crockett; John W. Lane; Michael J. Dechellis; Chris Melcer; Erica R. Porras; Aneesh Khullar; Balarabe N. Mohammed


Archive | 2006

In-line filter in a diffusion bonded layered substrate

Mark Crockett; John W. Lane; Michael J. Dechellis; Chris Melcer; Erica R. Porras; Aneesh Khullar; Balarabe N. Mohammed


Archive | 2006

Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate

Mark Crockett; John W. Lane; Michael J. Dechellis; Chris Melcer; Erica R. Porras; Aneesh Khullar; Balarabe N. Mohammed


Archive | 2007

METHOD AND SYSTEM FOR BAKE PLATE HEAT TRANSFER CONTROL IN TRACK LITHOGRAPHY TOOLS

Harald Herchen; Kim Vellore; Erica R. Porras


Archive | 2008

Apparatus for supporting a substrate during semiconductor processing operations

Harald Herchen; Kim Vellore; Erica R. Porras


Archive | 2007

Method and system for detection of wafer centering in a track lithography tool

Harald Herchen; Lily L. Pang; Erica R. Porras


Archive | 2007

METHOD AND SYSTEM TO MEASURE AND COMPENSATE FOR SUBSTRATE WARPAGE DURING THERMAL PROCESSING

Harald Herchen; Brian Lue; Kim Vellore; Erica R. Porras; James Yi Liu


Archive | 2007

Diffusion bonded fluid flow manifold with partially integrated inter-active component

Mark Crockett; John W. Lane; Micahel DeChellis; Chris Melcer; Erica R. Porras; Aneesh Khullar; Balarabe N. Mohammed


Archive | 2007

Method and System for Determining Object Height

Harald Herchen; Kim Vellore; Erica R. Porras


Archive | 2007

Method and system to measure flow velocity and volume

Harald Herchen; Erica R. Porras; Tetsuya Ishikawa

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