Ermin Esch

Micromachined Angular Rate Sensors for Automotive Applications

Micromachined angular rate sensors are key elements in several automotive systems, thus enabling highly sophisticated applications like rollover detection and mitigation, navigation systems, electronic stability program, and other future vehicle stabilizing and dynamics control systems. New automotive systems are demanding higher accuracy, better signal-to-noise ratio, higher robustness and insensitivity against external perturbations, better system availability and reliability, as well as easy application of the gyros. This paper is presenting the recent development, now the third generation, of micromachined angular rate sensors at Robert Bosch GmbH. Mass production was started in spring 2005. These surface micromachined gyroscopes exhibit outstanding performance compared to similar designs, especially in term of resolution, noise, and insensitivity against external perturbations

New surface micromachined angular rate sensor for vehicle stabilizing systems in automotive applications

Current developments in vehicle dynamics control systems and future advanced high performance vehicle stabilizing systems demand higher performance of the inertial signals of the vehicles dynamics, especially the angular rate signals: higher accuracy and better signal to noise ratio, high signal refresh rates, higher robustness and insensitivity against external interference, higher system availability and reliability, easier applicability (e.g. additional measuring axes). This paper presents a third generation angular rate sensor cluster MM3.x suitable for high volume production, meeting those demands. Design concepts of the core component - the new angular rate sensor module SMG - are unveiled, giving it outstanding functional performance compared to similar surface micromachined gyroscopes.