Eugenie Kirk

Sub-10 nm patterning using EUV interference lithography

Extreme ultraviolet (EUV) lithography is currently considered as the leading technology for high-volume manufacturing below sub-20 nm feature sizes. In parallel, EUV interference lithography based on interference transmission gratings has emerged as a powerful tool for industrial and academic research. In this paper, we demonstrate nanopatterning with sub-10 nm resolution using this technique. Highly efficient and optimized molybdenum gratings result in resolved line/space patterns down to 8 nm half-pitch and show modulation down to 6 nm half-pitch. These results show the performance of optical nanopatterning in the sub-10 nm range and currently mark the record for photon-based lithography. Moreover, an efficient phase mask completely suppressing the zeroth-order diffraction and providing 50 nm line/space patterns over large areas is evaluated. Such efficient phase masks pave the way towards table-top EUV interference lithography systems.

Micromagnetic simulation of exchange coupled ferri-/ferromagnetic composite in bit patterned media

Ferri-/ferromagnetic exchange coupled composites are promising candidates for bit patterned media because of the ability to control the magnetic properties of the ferrimagnet by its composition. A micromagnetic model for the bilayer system is presented where we also incorporate the microstructural features of both layers. Micromagnetic finite element simulations are performed to investigate the magnetization reversal behaviour of such media. By adding the exchange coupled ferrimagnet to the ferromagnet, the switching field could be reduced by up to 40% and also the switching field distribution is narrowed. To reach these significant improvements, an interface exchange coupling strength of 2 mJ/m2 is required.

Emergent dynamic chirality in a thermally driven artificial spin ratchet

Modern nanofabrication techniques have opened the possibility to create novel functional materials, whose properties transcend those of their constituent elements. In particular, tuning the magnetostatic interactions in geometrically frustrated arrangements of nanoelements called artificial spin ice can lead to specific collective behaviour, including emergent magnetic monopoles, charge screening and transport, as well as magnonic response. Here, we demonstrate a spin-ice-based active material in which energy is converted into unidirectional dynamics. Using X-ray photoemission electron microscopy we show that the collective rotation of the average magnetization proceeds in a unique sense during thermal relaxation. Our simulations demonstrate that this emergent chiral behaviour is driven by the topology of the magnetostatic field at the edges of the nanomagnet array, resulting in an asymmetric energy landscape. In addition, a bias field can be used to modify the sense of rotation of the average magnetization. This opens the possibility of implementing a magnetic Brownian ratchet, which may find applications in novel nanoscale devices, such as magnetic nanomotors, actuators, sensors or memory cells.

Control of the gyration dynamics of magnetic vortices by the magnetoelastic effect

The influence of a strain-induced uniaxial magnetoelastic anisotropy on the magnetic vortex core dynamics in microstructured magnetostrictive Co40Fe40B20 elements was investigated with time-resolved scanning transmission x-ray microscopy. The measurements revealed a monotonically decreasing eigenfrequency of the vortex core gyration with the increasing magnetoelastic anisotropy, which follows closely the predictions from micromagnetic modeling.

Switching field distribution of exchange coupled ferri-/ferromagnetic composite bit patterned media

We investigate the switching field distribution and the resulting bit error rate of exchange coupled ferri-/ferromagnetic bilayer island arrays by micromagnetic simulations. Using islands with varying microstructure and anisotropic properties, the intrinsic switching field distribution is computed. The dipolar contribution to the switching field distribution is obtained separately by using a model of a triangular patterned island array resembling 1.4 Tb/in2 bit patterned media. Both contributions are computed for different thicknesses of the soft exchange coupled ferrimagnet and also for ferromagnetic single phase FePt islands. A bit patterned media with a bilayer structure of FeGd( 5 nm)/FePt( 5 nm) shows a bit error rate of 10−4 with a write field of 1.16 T.

Observation of the out-of-plane magnetization in a mesoscopic ferromagnetic structure superjacent to a superconductor

The geometry of magnetic flux penetration in a high temperature superconductor at a buried interface was imaged using element-specific x-ray excited luminescence. We performed low temperature observation of the flux penetration in YBa2Cu3O7–δ (YBCO) at a buried interface by imaging of the perpendicular magnetization component in square Permalloy (Py) mesostructures patterned superjacent to a YBCO film. Element specific imaging below the critical temperature of YBCO reveals a cross-like geometry of the perpendicular magnetization component which is decorated by regions of alternating out-of-plane magnetization at the edges of the patterned Py structures. The cross structure can be attributed to the geometry of flux penetration originating from the superconductor and is reproduced using micromagnetic simulations. Our experimental method opens up possibilities for the investigation of flux penetration in superconductors at the nanoscale.The geometry of magnetic flux penetration in a high temperature superconductor at a buried interface was imaged using element-specific x-ray excited luminescence. We performed low temperature observation of the flux penetration in YBa2Cu3O7–δ (YBCO) at a buried interface by imaging of the perpendicular magnetization component in square Permalloy (Py) mesostructures patterned superjacent to a YBCO film. Element specific imaging below the critical temperature of YBCO reveals a cross-like geometry of the perpendicular magnetization component which is decorated by regions of alternating out-of-plane magnetization at the edges of the patterned Py structures. The cross structure can be attributed to the geometry of flux penetration originating from the superconductor and is reproduced using micromagnetic simulations. Our experimental method opens up possibilities for the investigation of flux penetration in superconductors at the nanoscale.

Vortex motion in amorphous ferrimagnetic thin film elements

Amorphous Fe64Gd36 thin film square elements are investigated by imaging in the Fresnel mode of a transmission electron microscope (TEM). The equilibrium state without an applied field shows the well-known four-domain flux closure pattern with in-plane magnetization. However, the vortex is displaced from the center of the square element and the domain walls are curved. In a reference measurement of a thin Ni81Fe19 element, the vortex core is perfectly centered and the domain walls straight. When an increasing external field is applied in-plane, the vortex core can be moved. While this motion of the vortex core is linear in NiFe elements, in the ferrimagnetic FeGd squares the vortex core moves by sudden jumps. Micromagnetic simulations show that the asymmetry of the domain patterns as well as the vortex core pinning and depinning can be attributed to random anisotropy and a patchy microstructure in amorphous films.