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Fairbairn Kevin

Applied Materials

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Publication

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Archive | 2002

METHOD AND INTEGRATED DEVICE FOR TREATING LOW DIELECTRIC CONSTANT DEPOSITION CONTAINING PECVD CAPPING MODULE

Ponnekanti Hari; Fairbairn Kevin; Somekh Sasson; Weidman Timothy; Shamouilian Shamouil; Moghadam Farhad

Archive | 1998

DEVICE AND METHOD FOR IMPROVING SUBSTRATE PROCESSING SYSTEM BY MICROWAVE PLASMA SOURCE

Tanaka Tsutomu; Mukul Kelkar; Fairbairn Kevin; Ponnekanti Hari; Cheung David

Archive | 1998

REMOTE PLASMA DEVICE

Fairbairn Kevin; Ponnekanti Hari; Cheung David W; Tanaka Tsutomu; Kelkar Mukul

Archive | 1998

WAFER CASSETTE ROTATING STAGE AND PREWAFER STAGING HAVING ON-THE-FLY WAFER CENTER FINDING

Fairbairn Kevin; Christopher Lane; Ponnekanti Hari; Satish Sunder; Kelley Koruboon; Alan Altwood

Archive | 1998

TANDEM PROCESSING CHAMBER

Fairbairn Kevin; Barzilai Jessica; Ponnekanti Hari; Taylor W Nick

Archive | 1998

MICROWAVE DEVICE FOR IN-SITU CLEANING FOR VACUUM PIPE OF SUBSTRATE PROCESSOR

Raoux Sebastian; Kelker Mukul; Ponnekanti Hari; Fairbairn Kevin; Cheung David; Tanaka Tsutomu

Archive | 2002

EXTERNAL IONIZATION-ASSISTED CVD SYSTEM

Tanaka Tsutomu; Nowak Thomas; Fairbairn Kevin

Archive | 2008

Wärmeschutzvorrichtung für Dichtungsringe in einem Plasmaerzeugungsgerät

Tanaka Tsutomu; Nowak Thomas; Nguyen Chau; Ponnekanti Hari; Fairbairn Kevin

Archive | 2000

MICROWAVE PLASMA GENERATOR WITH IMPROVED CONSTRUCTION OF PROTECTING O-RING FROM HEAT

Tanaka Tsutomu; Nowak Thomas; Nguyen Chau T; Ponnekanti Hari; Fairbairn Kevin

Archive | 1998

DOPPELFREQUENZ CVD VERFAHREN UND VORRICHTUNG

Raoux Sebastien; Mudholkar Mandar; Taylor William N; Fodor Mark; Huang Judy; Silvetti David; Cheung David; Fairbairn Kevin

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Ponnekanti Hari

Applied Materials

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Tanaka Tsutomu

Applied Materials

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Cheung David

Applied Materials

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Nowak Thomas

Applied Materials

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Raoux Sebastien

Applied Materials

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Fodor Mark

Applied Materials

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Huang Judy

Applied Materials

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Kelkar Mukul

Applied Materials

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Mudholkar Mandar

Applied Materials

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Nguyen Chau

Applied Materials

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