Fang Zhen

Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

A kind of hybrid device for acoustic noise reduction and vibration energy harvesting based on the silicon microperforated panel (MPP) resonant structure is investigated in the article. The critical parts of the device include MPP and energy harvesting membranes. They are all fabricated by means of silicon micro-electro-mechanical systems (MEMS) technology. The silicon MPP has dense and accurate micro-holes. This noise reduction structure has the advantages of wide band and higher absorption coefficients. The vibration energy harvesting part is formed by square piezoelectric membranes arranged in rows. ZnO material is used as it has a good compatibility with the fabrication process. The MPP, piezoelectric membranes, and metal bracket are assembled into a hybrid device with multifunctions. The device exhibits good performances of acoustic noise absorption and acoustic–electric conversion. Its maximum open circuit voltage achieves 69.41 mV.

Ultrasonic Energy Transference Based on an MEMS ZnO Film Array

An ultrasonic energy transference system with a ZnO square piezoelectric thin-film array (SPTFA) structure is presented. The design principle of the system is analyzed, and a device with the SPTFA structure is successfully fabricated based on MEMS processes. The characteristics of the energy transference system are investigated in detail. The experimental results reveal that the resonant frequency of the system is 13 MHz, the maximum voltage of the receiving end reaches 10.87 V when the amplitude of excitation voltage is 10 V, at that time the output power of system is 5.377 mW, and power density is 2.581 mW/cm2. The light emitting diode is lit successfully by the system in a distance of 3 mm.