Felipe G. S. Santos

Brillouin Optomechanics in Coupled Silicon Microcavities

The simultaneous control of optical and mechanical waves has enabled a range of fundamental and technological breakthroughs, from the demonstration of ultra-stable frequency reference devices, to the exploration of the quantum-classical boundaries in optomechanical laser-cooling experiments. More recently, such an optomechanical interaction has been observed in integrated nano-waveguides and microcavities in the Brillouin regime, where short-wavelength mechanical modes scatter light at several GHz. Here we engineer coupled optical microcavities to enable a low threshold excitation of mechanical travelling-wave modes through backward stimulated Brillouin scattering. Exploring the backward scattering we propose silicon microcavity designs based on laterally coupled single and double-layer cavities, the proposed structures enable optomechanical coupling with very high frequency modes (11 to 25 GHz) and large optomechanical coupling rates (g0/2π) from 50 kHz to 90 kHz.

Ultrahigh-Q optomechanical crystal cavities fabricated in a CMOS foundry

Photonic crystals use periodic structures to create frequency regions where the optical wave propagation is forbidden, which allows the creation and integration of complex optical functionalities in small footprint devices. Such strategy has also been successfully applied to confine mechanical waves and to explore their interaction with light in the so-called optomechanical cavities. Because of their challenging design, these cavities are traditionally fabricated using dedicated high-resolution electron-beam lithography tools that are inherently slow, limiting this solution to small-scale or research applications. Here we show how to overcome this problem by using a deep-UV photolithography process to fabricate optomechanical crystals in a commercial CMOS foundry. We show that a careful design of the photonic crystals can withstand the limitations of the photolithography process, producing cavities with measured intrinsic optical quality factors as high as Qi = (1.21 ± 0.02) × 106. Optomechanical crystals are also created using phononic crystals to tightly confine the GHz sound waves within the optical cavity, resulting in a measured vacuum optomechanical coupling rate of g0 = 2π × (91 ± 4) kHz. Efficient sideband cooling and amplification are also demonstrated since these cavities are in the resolved sideband regime. Further improvements in the design and fabrication process suggest that commercial foundry-based optomechanical cavities could be used for quantum ground-state cooling.

Efficient anchor loss suppression in coupled near-field optomechanical resonators

Elastic dissipation through radiation towards the substrate is a major loss channel in micro- and nanomechanical resonators. Engineering the coupling of these resonators with optical cavities further complicates and constrains the design of low-loss optomechanical devices. In this work we rely on the coherent cancellation of mechanical radiation to demonstrate material and surface absorption limited silicon near-field optomechanical resonators oscillating at tens of MHz. The effectiveness of our dissipation suppression scheme is investigated at room and cryogenic temperatures. While at room temperature we can reach a maximum quality factor of 7.61k (fQ-product of the order of 1011 Hz), at 22 K the quality factor increases to 37k, resulting in a fQ-product of 2 × 1012 Hz.

Hybrid Confinement Of Optical And Mechanical Modes In A Bullseye Optomechanical Resonator

Optomechanical cavities have proven to be an exceptional tool to explore fundamental and applied aspects of the interaction between mechanical and optical waves. Here we demonstrate a novel optomechanical cavity based on a disk with a radial mechanical bandgap. This design confines light and mechanical waves through distinct physical mechanisms which allows for independent control of the mechanical and optical properties. Simulations foresee an optomechanical coupling rate g0 reaching 2π × 100 kHz for mechanical frequencies around 5 GHz as well as anchor loss suppression of 60 dB. Our device design is not limited by unique material properties and could be easily adapted to allow for large optomechanical coupling and high mechanical quality factors with other promising materials. Finally, our devices were fabricated in a commercial silicon photonics facility, demonstrating g0/2π = 23 kHz for mechanical modes with frequencies around 2 GHz and mechanical Q-factors as high as 2300 at room temperature, also showing that our approach can be easily scalable and useful as a new platform for multimode optomechanics.

Multi-Ghz Bullseye Optomechanical Cavity

We propose a new design for an optomechanical cavity based on a disk with a mechanical radial bandgap. This design allows for independent control of the mechanical and optical frequency and large optomechanical coupling.