Fengming Nie

Research on precision grinding processing and compensation finishing experiment for mid-large- aperture square aspheric optical element

This paper analyzes dot-line envelope grinding principle, which is applicable to mid-large- aperture square aspheric optical element, determines the mathematical process control model based on X/Y/C three-axis aspheric grinding machine, We develop the appropriate high-precision aspheric grinding manufacturing and measurement systems software, using the plane grinding wheel to do the grinding experiments and the repeated compensation processing experiment. The experiments show that: high-precision aspheric grinding manufacturing and measurement systems software can be realized axisymmetric aspheric high-precision machining control and measurement; using compensation processing of the X/Y/C three-axis aspheric grinding machine which can effectively improve the precision PV value, surface error from the initial processing of the PV value :12 μm to the compensation processing of the PV value :3 μm .