Florentine Förster-Zügel

Fabrication of dielectric elastomer stack transducers (DEST)by liquid deposition modeling

Established fabrication methods for dielectric elastomer stack transducers (DEST) are mostly based on twodimensional thin-film technology. Because of this, DEST are based on simple two-dimensionally structured shapes. For certain applications, like valves or Braille displays, these structures are suited well enough. However, a more flexible fabrication method allows for more complex actuator designs, which would otherwise require extra processing steps. Fabrication methods with the possibility of three-dimensional structuring allow e.g. the integration of electrical connections, cavities, channels, sensor and other structural elements during the fabrication. This opens up new applications, as well as the opportunity for faster prototype production of individually designed DEST for a given application. In this work, a manufacturing system allowing three dimensional structuring is described. It enables the production of multilayer and three-dimensional structured DEST by liquid deposition modelling. The system is based on a custom made dual extruder, connected to a commercial threeaxis positioning system. It allows a computer controlled liquid deposition of two materials. After tuning the manufacturing parameters the production of thin layers with at thickness of less than 50 μm, as well as stacking electrode and dielectric materials is feasible. With this setup a first DEST with dielectric layer thickness less than 50 μm is build successfully and its performance is evaluated.

Adhesion promoters for large scale fabrication of dielectric elastomer stack transducers (DESTs) made of pre-fabricated dielectric films

Multilayer dielectric elastomer stack transducers (DESTs) are a promising new transducer technology with many applications in different industry sectors, like medical devices, human-machine-interaction, etc. Stacked dielectric elastomer transducers show larger thickness contraction driven by lower voltages than transducers made from a single dielectric layer. Traditionally multilayered DESTs are produced by repeatedly cross-linking a liquid elastomeric pre-polymer into the required shape. Our recent research focusses on a novel fabrication method for large scale stack transducers with a surface area over 200 x 300 mm by processing pre-fabricated elastomeric thin films of less than 50 μm thicknesses. The thin films are provided as two- or three-layer composites, where the elastomer is sandwiched between one or two sacrificial liners. Separating the elastomeric film from the residual layers and assembling them into dielectric elastomer stack transducers poses many challenges concerning adhesion, since the dielectric film merely separates from the liner if the adhesive forces between them are overcome. Conversely, during the assembly of a dielectric elastomer stack transducer, adhesive forces have to be established between two elastomeric layers or between the dielectric and the electrode layer. The very low Youngs modulus of at least one adhesion partner requires suitable means of increasing the adhesive forces between the different adhesive layers of a dielectric elastomer stack transducer to prevent a delamination of the transducer during its lifetime. This work evaluates different surface activation treatments - corona, low-pressure plasma and UV-light - and their applicability in the production of large scale DESTs made from pre-fabricated elastomeric films.

Investigation of the thermal effects in dynamically driven dielectric elastomer actuators

Dielectric elastomer actuators (DEAs) are compliant capacitors, which are able to transduce electrical into mechanical energy and vice versa. As they may be applied in different surrounding conditions and in applications with alternating excitations, it is necessary to investigate both, the thermal behavior and the influence of the temperature change during operation. Due to mechanical and electrical loss mechanisms during the energy transfer, the DEA is subjected to an intrinsic heating. In detail, the dielectric material, which has viscoelastic properties, shows a mechanical hysteresis under varying mechanical loads. This behavior leads to a viscoelastic loss of energy in the polymer layer, resulting in a heating of the structure. The non-ideal conduction of the electrode provokes a resistive loss when charging and discharging the electrode layer. Operation with frequencies in the kilohertz-range leads to remarkable local heat dissipation. The viscoelastic material behavior and the resistivity are assumed to be dependent on the temperature and/or on the strain of the material. By this, a back-coupling from the thermal field to the mechanical field or the electrical field is observed. In order to provide a thermal equilibrium, also the convective cooling – the structure is subjected to – has to be considered. Depending on the frequency and the type of electrical driving signal and mechanical load, viscoelastic and resistive heating provide different contributions during the dynamic process. In the present study we capture the described effects within our modeling approach. For a given dielectric elastomer actuator, numerical investigations are performed for a given electrical load.

Micromixer based on dielectric stack actuators for medical applications

Based on a previously developed microperistaltic pump, a micromixer made out of dielectric elastomer stack actuators (DESA) is proposed. The micromixer will be able to mix two fluids at the microscale, pumping both fluids in and out of the device. The device consists of three chambers. In the first and second chambers, fluids A and B are hosted, while in the third chamber, fluids A and B are mixed. The fluid flow regime is laminar. The application of voltage leads to an increase of the size of a gap in the z-axis direction, due to the actuators area expansion. This makes a channel open through which the fluid flows. The frequency of the actuation of the different actuators allows an increase of the flow rate. The micromixer can be used for applications such as drug delivery and synthesis of nucleic acids, the proposed device will be made of Polydimethylsiloxane (PDMS) as dielectric and graphite powder as electrode material. PDMS is a biocompatible material, widely used in the prosthesis field. Mixing fluids at a microscale is also in need in the lab-on-achip technology for complex chemical reactions.

Characterization of the dielectric breakdown strength of thin elastic films in various ambient media

Dielectric elastomer transducers (DETs) consist of an elastic dielectric film sandwiched between compliant electrodes. The dielectric breakdown field strength of the elastomer restricts the applied voltage. For an efficient operation of the DET, the breakdown strength of the elastomer has to be known. In this work, the application of a novel thin silicone film material from Wacker Chemie AG as elastic dielectric is investigated. The silicone film exhibits high breakdown strength and low thicknesses down to a few micrometers. Existing standards and methods for the measurement of breakdown strength seem to be not applicable for the thin silicone films. Therefore, a newly developed measurement setup for the characterization of the breakdown strength of thin elastic films in various ambient media (solids, liquids, gases) is described in this work. In addition, breakdown measurements in air, silicone oil and solid silicone are conducted. The results show the influence of the three different ambient media on the measured breakdown strength of the silicone film.

Switchable adhesion for wafer-handling based on dielectric elastomer stack transducers

Vacuum grippers are often used for the handling of wafers and small devices. In order to evacuate the gripper, a gas flow is created that can harm the micro structures on the wafer. A promising alternative to vacuum grippers could be adhesive grippers with switchable adhesion. There have been some publications of gecko-inspired adhesive devices. Most of these former works consist of a structured surface which adheres to the object manipulated and an actuator for switching the adhesion. Until now different actuator principles have been investigated, like smart memory alloys and pneumatics. In this work for the first time dielectric elastomer stack transducers (DEST) are combined with a structured surface. DESTs are a promising new transducer technology with many applications in different industry sectors like medical devices, human-machine-interaction and soft robotics. Stacked dielectric elastomer transducers show thickness contraction originating from the electromechanical pressure of two compliant electrodes compressing an elastomeric dielectric when a voltage is applied. Since DESTs and the adhesive surfaces previously described are made of elastomers, it is self-evident to combine both systems in one device. The DESTs are fabricated by a spin coating process. If the flat surface of the spinning carrier is substituted for example by a perforated one, the structured elastomer surface and the DEST can be fabricated in one process. By electrical actuation the DEST contracts and laterally expands which causes the gecko-like cilia to adhere on the object to manipulate. This work describes the assembly and the experimental results of such a device using switchable adhesion. It is intended to be used for the handling of glass wafers.

Simulation of the Transient Electromechanical Behaviour of Dielectric Elastomer Transducers

To design systems utilizing dielectric elastomer transducers (DET) models are necessary to describe the behaviour of the DET and assess the system performance in advance. For basic set-ups simple analytical models or lumped parameter models are available and provide reasonable results. For more complex set-ups these models only allow a rough estimation of the system performance, not accurate enough to achieve an optimal system design. Therefore system designers typically resort to numerical simulation tools. Commercially available tools and models specialize on either electrical or mechanical domain thus simplifying or even neglecting effects in the other domain respectively. In this work we present a simulation tool taking into account the transient electrical and mechanical behaviour of DET under different mechanical load conditions and electrical driving frequencies. Our model can describe transient electrical and mechanical behaviour, such as electrical resistance, mechanical hyperelastic and viscosity of the electrodes and dielectric material. Model parameters are derived from measurements of the dielectric and the electrode resistance as well as e.g. the materials Young’s modulus. The results from the simulation are compared to simple lumped parameter based models.