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Dive into the research topics where Florian Schoen is active.

Publication


Featured researches published by Florian Schoen.


Archive | 2008

Wafer level packaged MEMS integrated circuit

Horst Theuss; Markus Loehndorf; Florian Schoen


Archive | 2008

Passive temperature compensation of silicon mems devices

Florian Schoen; Robert Gruenberger; Mohsin Nawaz; Bernhard Winkler


Archive | 2013

MEMS resonator devices

Bernhard Winkler; Mohsin Nawaz; Florian Schoen


Archive | 2010

MEMS Devices and Methods of Manufacture Thereof

Florian Schoen; Wolfgang Raberg; Bernhard Winkler; Werner Weber


Archive | 2008

Mems-Bauelemente und Verfahren zur Herstellung derselben

Wolfgang Raberg; Florian Schoen; Werner Weber; Bernhard Winkler


Archive | 2010

MEMS Substrates, Devices, and Methods of Manufacture Thereof

Florian Schoen


Archive | 2009

MEMS resonator devices with a plurality of mass elements formed thereon

Bernhard Winkler; Mohsin Nawaz; Florian Schoen


Archive | 2011

Wafer-Level-gekapselte integrierte MEMS-Schaltung

Horst Theuss; Markus Loehndorf; Florian Schoen


Archive | 2010

SILICON MEMS RESONATORS

Florian Schoen; Markus Loehndorf


Archive | 2008

SILICON MEMS RESONATOR DEVICES AND METHODS

Markus Loehndorf; Wolfgang Raberg; Florian Schoen

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