Frank Arndt

Optical imaging method, and an apparatus for optical imaging

Adaptive optical element comprising a polymer actuator

Polymer actuator having a stacked design and method for the production thereof

Process for making an oblique-sided recess in a substrate

Three wafer semiconductor pressure-difference sensor and method for manufacture separating middle wafer into conducting diaphragm and web

Verfahren zum verbinden von zwei platten

Miniature reactor to determine process parameters has reaction chamber formed by etching or other micro-mechanical process

Verfahren zum Verbinden eines scheibenförmigen Isolierkörpers mit einem scheibenförmigen, leitfähigen Körper

Cladding comprising an integrated polymer actuator for the deformation of said cladding

Process for manufacturing a pressure-difference sensor