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Frank Auer

ASML Holding

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Publication

Featured researches published by Frank Auer.

Archive | 2004

Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting device

Johannes Adrianus Antonius Theodorus Dams; Frank Auer

Archive | 2001

Lithographic projection apparatus with a supporting assembly

Martinus Agnes Willem Cuijpers; Frank Auer; Robertus Nicodemus Jacobus van Ballegoij

Archive | 2001

Lithographic projection apparatus, supporting assembly and device manufacturing method

Martinus Agnes Willem Cuijpers; Frank Auer; Robertus Nicodemus Jacobus van Ballegoij

Archive | 2002

Lithographic apparatus, device manufacturing method, and device manufacturing thereby

Frank Auer; Franciscus Andreas Cornelis Johannes Spanjers; J. Holterman; Marinus Pieter Koster; Theodorus Jacobus Adrianus De Vries

Archive | 2009

Lithographic apparatus and position sensor

Olaf Hubertus Wilhelmus Van Bruggen; Frank Auer; Marcel Koenraad Marie Baggen; Frits Van Der Meulen; Patrick David Vogelsang; Martinus Cornelis Reijnen; Johannes Roland Dassel; Stoyan Nihtianov; Remko Wakker; Tom Van Zutphen

Archive | 2004

Support device and lightographic apparatus

Hans Butler; Frank Auer; Martinus Van Duijnhoven; Pieter Johannes Gertrudis Meijers; Jan-Gerard Cornelis Van Der Toorn; Joost De Pee

Archive | 2011

Lithographic apparatus, and motor cooling device

Frank Auer

Archive | 2009

A lithographic apparatus provided with a swap bridge

Matthias Kruizinga; Frank Auer; Fransiscus Mathijs Jacobs; Ronnie Herman Anna Hensen

International Symposium on Active Control of Sound and Vibration, ACTIVE 2002 | 2002

Active damping based on decoupled collocated control

J. Holterman; Theodorus Jacobus Adrianus De Vries; Frank Auer

Archive | 2008

Damped mount for use in lithographic projection apparatus

Frank Auer; Franciscus Andreas Cornelis Johannes Spanjers; J. Holterman; Theodorus Jacobus Adrianus De Vries; Marinus Pieter Koster

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Collaboration

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Hans Butler

Eindhoven University of Technology

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Theodorus J.A. de Vries

University of Twente

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