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Frank Jeroen Pieter Schuurmans

ASML Holding

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Publication

Featured researches published by Frank Jeroen Pieter Schuurmans.

Archive | 2003

Lithographic projection apparatus and reflector assembly for use therein

Levinus Pieter Bakker; Jeroen Jonkers; Frank Jeroen Pieter Schuurmans; Hugo Matthieu Visser

Archive | 2003

Lithographic projection apparatus and particle barrier for use therein

Levinus Pieter Bakker; Frank Jeroen Pieter Schuurmans; Vadim Yevgenyevich Banine

Archive | 2003

Contamination barrier with expandable lamellas

Levinus Pieter Bakker; Marcel Mathijs Theodore Marie Dierichs; Johannes Maria Freriks; Frank Jeroen Pieter Schuurmans; Jakob Vijfvinkel; Wilhelmus Josephus Box

Archive | 2004

Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trap

Levinus Pieter Bakker; Vadim Yevgenyevich Banine; Cornelis Petrus Andreas Maria Luijkx; Frank Jeroen Pieter Schuurmans

Archive | 2004

Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby

Levinus Pieter Bakker; Frank Jeroen Pieter Schuurmans; Vadim Yevgenyevich Banine

Archive | 2006

Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method

Levinus Pieter Bakker; Jeroen Jonkers; Frank Jeroen Pieter Schuurmans; Hugo Matthieu Visser

Archive | 2004

Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby

Levinus Pieter Bakker; Vadim Yevgenyevich Banine; Ralph Kurt; Frank Jeroen Pieter Schuurmans; Yurii Victorovitch Sidelnikov

Archive | 2003

Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus

Vadim Yevgenyevich Banine; Johannes Peterus Henricus De Kuster; Johannes Hubertus Josephina Moors; Frank Jeroen Pieter Schuurmans; Lucas Henricus Johannes Stevens

Archive | 2004

Laser produced plasma radiation system with contamination barrier

Levinus Pieter Bakker; Vadim Yevgenyevich Banine; Ralph Kurt; Frank Jeroen Pieter Schuurmans; Yurii Victorovitch Sidelnikov

Archive | 2003

Lithographic projection apparatus with multiple suppression meshes

Levinus Pieter Bakker; Frank Jeroen Pieter Schuurmans

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