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Frank Miceli

Agere Systems

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Publication

Featured researches published by Frank Miceli.

Archive | 2000

Electrochemical mechanical planarization apparatus and method

William G. Easter; John A. Maze; Frank Miceli

Archive | 2000

Polishing apparatus with carrier ring and carrier head employing like polarities

Annette M. Crevasse; William G. Easter; John A. Maze; Frank Miceli

Archive | 2000

Apparatus and method for reclamation of used polishing slurry

Annette M. Crevasse; William G. Easter; John A. Maze; Frank Miceli

Archive | 2000

Apparatus and method for gradient cleaning of semiconductor wafers

Annette M. Crevasse; William G. Easter; John A. Maze; Frank Miceli

Archive | 2000

Semiconductor polishing pad alignment device for a polishing apparatus and method of use

Annette M. Crevasse; William G. Easter; John A. Maze; Frank Miceli

Archive | 2000

Test structures for testing planarization systems and methods for using same

Alvaro Maury; Frank Miceli; Subramanian Karthikeyan

Archive | 1999

Mouse and mouse template for a motion impaired user

Annette M. Crevasse; William G. Easter; John A. Maze; Frank Miceli

Archive | 2001

Polishing surface temperature conditioning system for a chemical mechanical planarization process

Annette M. Crevasse; William G. Easter; John A. Maze; Frank Miceli; Yifeng Winsten Yan

Archive | 2001

Polishing head for pressurized delivery of slurry

Fook Loong Chin; Arun K. Nanda; Frank Miceli

Archive | 2000

Apparatus and method for in-situ measurement of polishing pad thickness loss

Richardson O. Adebanjo; William G. Easter; Alvaro Maury; Frank Miceli; Jose Omar Rodriguez

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Collaboration

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William G. Easter

Agere Systems

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John A. Maze

Agere Systems

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Annette M. Crevasse

Agere Systems

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Jose Omar Rodriguez

Agere Systems

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Andres B. Garcia

Agere Systems

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Charles A. Storey

Agere Systems

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Margareth Seputro

Agere Systems

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Alvaro Maury

Agere Systems

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Dale Delano Evans

Agere Systems

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Allen Yen

Agere Systems

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