Fred L. Terry

Mid-infrared supercontinuum generation to 4.5 μm in ZBLAN fluoride fibers by nanosecond diode pumping

A mid-infrared supercontinuum (SC) is generated in ZBLAN (ZrF4-BaF2-LaF3-AlF3-NaF...) fluoride fibers from amplified nanosecond laser diode pulses with a continuous spectrum from approximately 0.8 microm to beyond 4.5 microm. The SC has an average power of approximately 23 mW, a pump-to-SC power conversion efficiency exceeding 50%, and a spectral power density of approximately -20 dBm/nm over a large fraction of the spectrum. The SC generation is initiated by the breakup of nanosecond laser diode pulses into femtosecond pulses through modulation instability, and the spectrum is then broadened primarily through fiber nonlinearities in approximately 2-7 m lengths of ZBLAN fiber. The SC long-wavelength edge is consistent with the intrinsic ZBLAN material absorption.

Radiation effects in nitrided oxides

Electron radiation effects on silicon dioxide films, before and after ammonia annealing (nitridation), have been studied. The most striking result is that the generation of radiation-induced interface states is nearly eliminated in the nitrided oxides.

Supercontinuum generation from ~1.9 to 4.5 μmin ZBLAN fiber with high average power generation beyond 3.8 μm using a thulium-doped fiber amplifier

A mid-IR supercontinuum (SC) fiber laser based on a thulium-doped fiber amplifier (TDFA) is demonstrated. A continuous spectrum extending from ∼1.9 to 4.5 μm is generated with ∼0.7 W time-average power in wavelengths beyond 3.8 μm. The laser outputs a total average power of up to ∼2.6 W from ∼8.5 m length of ZrF4─BaF2─LaF3─AlF3─NaF (ZBLAN) fiber, with an optical conversion efficiency of ∼9% from the TDFA pump to the mid-IR SC. Optimal efficiency in generating wavelengths beyond 3.8 μm is achieved by reducing the losses in the TDFA stage and optimizing the ZBLAN fiber length. We demonstrate a novel (to our knowledge) approach of generating modulation instability-initiated SC starting from 1.55 μm by splitting the spectral shifting process into two steps. In the first step, amplified approximately nanosecond-long 1.55 μm laser diode pulses with ∼2.5 kW peak power generate a SC extending beyond 2.1 μm in ∼25 m length of standard single-mode fiber (SMF). The ∼2 μm wavelength components at the standard SMF output are amplified in a TDFA and coupled into ZBLAN fiber leading to mid-IR SC generation. Up to ∼270 nm SC long wavelength edge extension and ∼2.5× higher optical conversion efficiency to wavelengths beyond 3.8 μm are achieved by switching an Er:Yb-based power amplifier stage with a TDFA. The laser also demonstrates scalability in the average output power with respect to the pulse repetition rate and the amplifier pump power. Numerical simulations are performed by solving the generalized nonlinear Schrodinger equation, which show the long wavelength edge of the SC to be limited by the loss in ZBLAN.

10.5 W Time-Averaged Power Mid-IR Supercontinuum Generation Extending Beyond 4

A novel, all-fiber-integrated supercontinuum (SC) laser is demonstrated and provides up to 10.5 W time-averaged power with a continuous spectrum from ~0.8 to 4 mum. The SC is generated in a combination of standard single-mode fibers and ZrF4-BaF2-LaF3-AlF3-NaF (ZBLAN) fluoride fibers pumped by a laser-diode-based cladding-pumped fiber amplifier system. The output SC pulse pattern can be modulated by directly modulating the seed laser diode. Near-diffraction-limited beam qualities are maintained over the entire SC spectrum. The SC average power is also linearly scalable by varying the input pump power and pulse repetition rate. We further investigate the theoretical limitations on the achievable average power handling and spectral width for the SC generation in ZBLAN fibers. Based on the thermal modeling, the standard ZBLAN fiber can handle a time-averaged power up to ~15 W, which can be further scaled up to ~40 W with a proper thermal coating applied onto the ZBLAN fiber. The SC long-wavelength edge is limited by the nonlinear wavelength generation processes, fiber bend-induced loss, and glass material loss. By using a ZBLAN fiber with a 0.3 numerical aperture, the SC spectrum could extend out to ~4.5 mum, which is then limited by the material loss.

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Reports a degradation in effective channel mobility with increasing degree of nitridation, as much as 50% for electrons, noticeably less for holes. While both hole and electron mobilities are degraded by Coulombic scattering from nitridation-induced fixed charge, the additional mobility degradation for electrons is attributed to a reduction of the mobile electron density by electron trapping in near-interface traps and to additional Coulombic scattering of the remaining channel electrons by the trapped electrons. >

m With Direct Pulse Pattern Modulation

In this letter, we show that normal-incidence spectroscopic ellipsometry can be used for high-accuracy topography measurements on surface relief gratings. We present both experimental and theoretical results which show that spectroscopic ellipsometry or reflectance-difference spectroscopy at near-normal incidence coupled with vector diffraction theory for data analysis is capable of high-accuracy critical dimension ~CD!, feature height, and sidewall angle measurements in the extreme submicron regime. Quantitative comparisons of optical and cross-sectional scanning electron microscopy ~SEM! topography measurements from a number of 350 nm line/space reactive-ion-etched Si gratings demonstrate the strong potential for in situ etching monitoring. This technique can be used for both ex situ and in situ applications and has the potential to replace the use of CD-SEM measurements in some applications.

IVB-2 Inversion layer mobility of MOSFET's with Nitrided Oxide gate dielectrics

This paper describes the development of real-time control technology for the improvement of manufacturing characteristics of reactive ion etchers. A general control strategy is presented. The principal ideas are to sense key plasma parameters, develop a dynamic input-output model for the subsystem connecting the equipment inputs to the key plasma variables, and design and implement a multivariable control system to control these variables. Experimental results show that this approach to closed-loop control leads to a much more stable etch rate in the presence of a variety of disturbances as compared to current industrial practice. >

Normal-incidence spectroscopic ellipsometry for critical dimension monitoring

Mid-infrared supercontinuum (SC) extending to ~4.0 mum is generated with 1.3 W time-averaged power, the highest power to our knowledge, in ZBLAN (ZrF(4)-BaF(2)-LaF(3)-AlF(3)-NaF...) fluoride fiber by using cladding-pumped fiber amplifiers and modulated laser diode pulses. We demonstrate the scalability of the SC average power by varying the pump pulse repetition rate while maintaining the similar peak power. Simulation results obtained by solving the generalized nonlinear Schrödinger equation show that the long wavelength edge of the SC is primarily determined by the peak pump power in the ZBLAN fiber.

Control of semiconductor manufacturing equipment: real-time feedback control of a reactive ion etcher

Abstract Bulk GaAs has undergone extensive research by several groups in order to ascertain its usefulness as a room temperature radiation spectrometer. The results of an experimental program studying the properties of detectors fabricated from bulk GaAs are summarized in this paper. Electric field models of the active region are compared with measured results. Limitations of bulk LEC GaAs as a material for radiation spectrometers are discussed.

Power scalable mid-infrared supercontinuum generation in ZBLAN fluoride fibers with up to 1.3 watts time-averaged power

We measure the diffuse reflection spectrum of solid samples such as explosives (TNT, RDX, PETN), fertilizers (ammonium nitrate, urea), and paints (automotive and military grade) at a stand-off distance of 5 m using a mid-infrared supercontinuum light source with 3.9 W average output power. The output spectrum extends from 750-4300 nm, and it is generated by nonlinear spectral broadening in a 9 m long fluoride fiber pumped by high peak power pulses from a dual-stage erbium-ytterbium fiber amplifier operating at 1543 nm. The samples are distinguished using unique spectral signatures that are attributed to the molecular vibrations of the constituents. Signal-to-noise ratio (SNR) calculations demonstrate the feasibility of increasing the stand-off distance from 5 to ~150 m, with a corresponding drop in SNR from 28 to 10 dB.