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Fu-Liang Yang

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Publication

Featured researches published by Fu-Liang Yang.

Archive | 1998

Method for simultaneously fabricating a DRAM capacitor and metal interconnections

Fu-Liang Yang; Erik S. Jeng; Bih-Tiao Lin; I-Ping Lee

Archive | 1998

Method for simultaneously forming capacitor plate and metal contact structures for a high density DRAM device

Fu-Liang Yang; Bi-Ling Chen; Erik S. Jeng

Archive | 1999

Method of fabricating a self-aligned contact

Chien-Sheng Hsieh; Wei-Ray Lin; Fu-Liang Yang; Erik S. Jeng; Bor-Ru Sheu

Archive | 1997

Method for manufacturing double-crown capacitors self-aligned to node contacts on dynamic random access memory

Fu-Liang Yang; Erik S. Jeng

Archive | 1998

Method of making a shallow trench isolation for ULSI formation via in-direct CMP process

Fu-Liang Yang; Wei-Ray Lin; Ming-Hong Kuo

Archive | 1996

Method of fabricating single crown, extendible to triple crown, stacked capacitor structures, using a self-aligned capacitor node contact

Fu-Liang Yang; Erik S. Jeng

Archive | 1997

Method of forming an isolation region in a semiconductor substrate

Erik S. Jeng; Fu-Liang Yang

Archive | 1997

Stacked capacitor DRAM structure featuring a multiple crown shaped polysilicon lower electrode

Fu-Liang Yang; Erik S. Jeng

Archive | 1999

Method to solve the dishing issue in CMP planarization by using a nitride hard mask for local inverse etchback and CMP

Ming-Hong Kuo; Wei-Ray Lin; Fu-Liang Yang

Archive | 1999

Method for eliminating CMP induced microscratches

Fu-Liang Yang; Bih-Tiao Lin; Tzu-Shih Yen; Bi-Ling Chen; Erik S. Jeng

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