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Dive into the research topics where Fujio Wakaya is active.

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Featured researches published by Fujio Wakaya.


Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 2013

Development of planar x-ray source using gated carbon nanotube emitter

Tomoya Manabe; Shogo Nitta; Satoshi Abo; Fujio Wakaya; Mikio Takai

A planar x-ray source using gated carbon nanotube (CNT) emitters was developed. In the diode structure measurement, the turn-on electric field of the CNT cathode was approximately 1.2 V/μm. In the triode structure measurement, characteristic x-ray peaks of Cu and bremsstrahlung x-rays were observed. The maximum energies of the bremsstrahlung x-rays were in agreement with anode voltages. Pulse x-rays synchronized with pulsed gate voltages. Clear x-ray transmission images with high spatial resolution ≤165 μm were obtained.


Microelectronic Engineering | 2015

Maskless laser processing of graphene

Fujio Wakaya; Tadashi Kurihara; Nariaki Yurugi; Satoshi Abo; Masayuki Abe; Mikio Takai

Display Omitted Graphene on a SiO2/Si substrate was removed by UV pulsed laser irradiation.Threshold laser power density to remove graphene depended on the graphene thickness.The mechanism is discussed using kinetic energy of thermal expansion.Thickness (or layer-number) selective process for graphene is demonstrated.Maskless patterning of graphene using laser irradiation in the air is demonstrated. Graphene on a SiO2/Si substrate was removed by ultraviolet pulsed laser irradiation. Threshold laser power density to remove graphene depended on the graphene thickness. The mechanism is discussed using kinetic energy of thermal expansion of the substrate surface. Utilizing the thickness dependence, thickness (or layer-number) selective process for graphene is demonstrated. Maskless patterning of graphene using laser irradiation in the air is also demonstrated.


Japanese Journal of Applied Physics | 2015

X-ray source using carbon-nanotube field emitter with side-gate electrode

Shuhei Okawaki; Satoshi Abo; Fujio Wakaya; Masayuki Abe; Mikio Takai

A carbon-nanotube (CNT) field emitter with side-gate electrodes, which are placed in-plane with the CNT emitters, is one of the most promising structures to realize a large-area X-ray charge neutralizer with a cost-effective and easy process. An X-ray source using the screen-printed CNT field emitter with side-gate electrodes is developed. The field-emission and X-ray properties are evaluated with anode voltages of 5 and 10 kV. It is shown that the emission current can be controlled by the side-gate voltage even with such high anode voltages as 5 and 10 kV. It is reported that the highest anode current is approximately 1 µA, which is high enough for an X-ray charge neutralizer. The X-ray radiation is successfully controlled by the pulsed side-gate voltage with subsecond length.


Japanese Journal of Applied Physics | 2016

Characterization of X-ray charge neutralizer using carbon-nanotube field emitter

Shuhei Okawaki; Satoshi Abo; Fujio Wakaya; Hayato Yamashita; Masayuki Abe; M. Takai

An X-ray charge neutralizer using a screen-printed carbon-nanotube field emitter is demonstrated to show the possibility of a large-area flat-panel charge neutralizer, although the device dimensions in the present work are not very large. The X-ray yields and spectra are characterized to estimate the ion generation rate as one of the figures of merit of neutralizers. Charge neutralization characteristics are measured and show good performance.


Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 2013

Observation of fringelike electron emission pattern from triode Pt nano electron source fabricated by electron-beam-induced deposition

Tomohisa Kitayama; Satoshi Abo; Fujio Wakaya; Mikio Takai

A triode Pt nano electron source with a gate electrode to control the intensity of fringelike emission pattern with low gate voltage has been fabricated. Characteristics of the triode Pt nano electron source were measured at room temperature in a vacuum of less than 10−7 Pa. The emission current was observed when the gate voltage was higher than 30 V and showed a linear dependence in the Fowler–Nordheim plot. Electron wave interference patterns from the triode Pt nano electron source were first observed. The intensity of the electron wave interference pattern was successfully controlled by the gate voltage up to 50 V.


international vacuum nanoelectronics conference | 2014

Electron emission from pyroelectric crystal excited using high power infra-red laser light and its x-ray source application

Satoshi Abo; Takahiro Uezato; Fujio Wakaya; Mikio Takai

The characteristics of the x-ray source with the LiTaO3 crystal excited using 0.89-W Nd:YLF and 5.0-W fiber laser lights were measured and compared to each other for the development of the high energy and high dose x-ray source. The maximum x-ray energy from the LiTaO3 x-ray source excited using a 5.0-W fiber laser light was higher than that using a 0.89-W Nd:YLF laser light. The average radioactivity of the LiTaO3 x-ray source excited using a fiber laser light with a power of 5.0 W for 90 s was 3.2 times higher than that using a Nd:YLF laser light with a power of 0.89 W. The peak radioactivity of the x-ray source excited using a 5.0-W fiber laser light was 9.8 times higher than that using a 0.89-W Nd:YLF laser light. These results were due to the faster and higher temperature rising using the high power fiber laser light than the low power Nd:YLF laser light.


international vacuum nanoelectronics conference | 2013

CNT cold cathode with side-gate electrode for flat panel X-ray source

Shogo Nitta; Shuhei Okawaki; Satoshi Abo; Fujio Wakaya; Mikio Takai

A carbon nanotube (CNT) cold cathode with a side-gate electrode for a flat panel X-ray source was developed and basic characteristics of the CNT cathode with surface treatments were evaluated. The CNT cathode treated by KrF excimer laser irradiation with a high electric field pulse aging showed the best performance concerning long lifetime, while the CNT cathode treated by tape peeling method without a high electric field pulse aging showed the best performance concerning high anode current. Observed anode current at 4 kV is comparable with some of the commercially available X-ray tubes, suggesting that the CNT cathode with side-gate electrodes can be used for an electron source for a flat panel X-ray source.


Journal of Applied Physics | 2013

Photoassisted electron emission from metal-oxide-semiconductor cathodes based on nanocrystalline silicon

H. Shimawaki; Yoichiro Neo; Hidenori Mimura; Fujio Wakaya; Mikio Takai

This paper investigates the effect of optical pulses on the electron emission properties of metal-oxide-semiconductor (MOS) cathodes based on nanocrystalline silicon (nc-Si). The emission current is enhanced by about two orders of magnitude by the irradiation of 405 nm laser light. The increase of the emission current under irradiation was proportional to incident laser power. The differential quantum efficiency of the nc-Si based MOS diode itself was estimated to be 3 × 10−2. However, the value of the photoemission current was only 3 × 10−7 due to the short mean free path of hot electron for Pt used as the gate electrode. We obtained a pulsed electron beam from the cathode device by a pulsed laser. The result shows that MOS type cathodes have a suitable structure for optically generating a train of short electron bunches.


Microelectronic Engineering | 2013

Ultra-violet laser processing of graphene on SiO2/Si

Fujio Wakaya; Tadashi Kurihara; Satoshi Abo; Mikio Takai


Materials Transactions | 2015

A Preparation Method for Atomically Clean Sapphire Surfaces and High Resolution Topographic Method for Their Imaging by Non-Contact Atomic Force Microscopy

daiki katsube; Yutaro Takase; Hayato Yamashita; Satoshi Abo; Fujio Wakaya; Masayuki Abe

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