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Dive into the research topics where Fukuda Takuya is active.

Publication


Featured researches published by Fukuda Takuya.


Archive | 1992

Microwave plasma treating device

Fukuda Takuya; Ogami Michio; Konishi Nobutake; Sonobe Tadashi; Suzuki Kazuo


Archive | 1988

Method and device for microwave plasma processing

Fukuda Takuya; Mochizuki Yasuhiro; Monma Naohiro; Takahashi Shigeru; Ogami Michio; Sonobe Tadashi; Suzuki Kazuo


Archive | 1990

METAL CIRCUIT AND ITS MANUFACTURE

Fukuda Takuya; Ogami Michio


Archive | 1996

DIELECTRIC BODY, MANUFACTURE THEREOF, AND SEMICONDUCTOR DEVICE

Fukuda Takuya; Kanai Fumiyuki; Katou Kiyotaka


Archive | 1988

MICROWAVE PLASMA THIN FILM FORMING DEVICE

Mochizuki Yasuhiro; Fukuda Takuya; Takahashi Shigeru; Monma Naohiro; Suzuki Noboru; Sonobe Tadashi; Chiba Atsushi; Suzuki Kazuo


Archive | 1993

ECR PLASMA TREATMENT DEVICE

Saito Katsuaki; Fukuda Takuya; Ogami Michio; Hirose Shunichi; Suzuki Kazuo


Archive | 1991

PLASMA TREATING APPARATUS AND METHOD THEREFOR

Fukuda Takuya; Ogami Michio; Sonobe Tadashi


Archive | 1990

OPTICAL PUMPING PROCESS DEVICE

Nishihara Hideaki; Ogami Michio; Fukuda Takuya


Archive | 1990

PLASMA TREATMENT DEVICE AND ITS TREATMENT METHOD

Aoyama Takashi; Fukuda Takuya; Konishi Nobutake; Ono Kikuo; Sonobe Tadashi


Archive | 1989

SYSTEMS FOR NEGATIVE ION GENERATION AND SUBSTRATE PROCESSING

Fukuda Takuya; Ogami Michio; Monma Naohiro

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