Fukushima Makoto | Researchain

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Featured researches published by Fukushima Makoto.

Archive | 2013

SUBSTRATE HOLDING DEVICE, POLISHING APPARATUS AND POLISHING METHOD

Fukushima Makoto; Yasuda Hozumi; Namiki Keisuke; Nabeya Osamu; Togashi Shingo; Yamaki Akira

Archive | 2010

POLISHING METHOD AND ITS DEVICE

Fukushima Makoto; Togawa Tetsuji; Saito Shingo; Inoue Tomomi

Archive | 2007

SUBSTRATE HOLDER, POLISHER AND POLISHING METHOD

Yasuda Hozumi; Togawa Tetsuji; Nabeya Osamu; Saito Kenichiro; Fukushima Makoto; Inoue Tomomi

Archive | 2003

SUBSTRATE HOLDING DEVICE AND SUBSTRATE POLISHING DEVICE

Togawa Tetsuji; Nomichi Ikutaro; Namiki Keisuke; Yasuda Hozumi; Kojima Shiyunichirou; Sakurai Kunihiko; Takada Nobuyuki; Nabeya Osamu; Fukushima Makoto; Takayanagi Hideki

Archive | 2017

SUBSTRATE ADSORPTION METHOD, SUBSTRATE HOLDING APPARATUS, SUBSTRATE POLISHING APPARATUS, ELASTIC FILM, SUBSTRATE ADSORPTION DETERMINATION METHOD FOR SUBSTRATE HOLDING APPARATUS, AND PRESSURE CONTROL METHOD FOR SUBSTRATE HOLDING APPARATUS

Shinozaki Hiroyuki; Fukushima Makoto; Nabeya Osamu

Archive | 2014

ELASTIC FILM, AND SUBSTRATE HOLDING APPARATUS

Fukushima Makoto; Yasuda Hozumi; Nabeya Osamu; Togashi Shingo

Archive | 2012

A method of polishing a substrate

Togawa Tetsuji; Yoshida Hiroshi; Nabeya Osamu; Fukushima Makoto; Fukaya Koichi

Archive | 2011

POLISHING APPARATUS, POLISHING METHOD, RETAINER RING AND ELASTIC MEMBRANE

Yasuda Hozumi; Togawa Tetsuji; Nabeya Osamu; Saito Kenichiro; Fukushima Makoto; Inoue Tomoshi

Archive | 2010

POLISHING METHOD AND EQUIPMENT

Togawa Tetsuji; Nomichi Ikutaro; Namiki Keisuke; Yasuda Hozumi; Kojima Shunichiro; Sakurai Kunihiko; Takada Nobuyuki; Nabeya Osamu; Fukushima Makoto; Takayanagi Hideki

Archive | 2009